Patents by Inventor Travis W. Grodt

Travis W. Grodt has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUV mask defect tool apparatus
    Patent number: 11960202
    Abstract: An EUV microscope device utilizing a source of a beam of EUV light. The light is sent to a collector which produces a first focused EUV beam. A monochromator receives the first focused EUV beam and produces a second EUV beam that is passed to an illumination module. The output of the illumination module is passed to a mask. The reflected beam from the mask is sent to a zone plate and a detector to produce an image.
    Type: Grant
    Filed: October 15, 2021
    Date of Patent: April 16, 2024
    Assignee: EUV TECH, INC.
    Inventors: Chami N Perera, David C. Houser, Charles G. Murray, Alexander N. Khodarev, Travis W. Grodt
  • EUV MICROSCOPE
    Publication number: 20230121350
    Abstract: An EUV microscope apparatus utilizing a source of EUV light. The light is sent to a collector which creates a first focused EUV beam. A monochromator module receives the first focused EUV beam and produces a second focused EUV beam that is passed to an illumination module. The output of the illumination module is reflected off a mask. The reflected beam from the mask is sent to a zone-plate and a detector to produce an image.
    Type: Application
    Filed: August 23, 2022
    Publication date: April 20, 2023
    Applicant: EUV TECH, INC.
    Inventors: CHAMI N. PERERA, DAVID C. HOUSER, CHARLES G. MURRAY, ALEXANDER N. KHODAREV, TRAVIS W. GRODT
  • Raman apparatus and methods
    Patent number: 10234395
    Abstract: Provided herein is an apparatus, including an excitation arm including excitation optics; a collection arm including collection optics, wherein the excitation arm and the collection arm are geometrically off-axis from one another for independent control of the excitation optics or the collection optics; and a full-surface spectroscopic analyzer to analyze a thin-film over an article from Raman-scattered light collected by the collection optics.
    Type: Grant
    Filed: August 24, 2015
    Date of Patent: March 19, 2019
    Assignee: Seagate Technology LLC
    Inventors: Daniel J. Gargas, David M. Tung, Travis W. Grodt, Joachim W. Ahner
  • Reflective surfaces for surface features of an article
    Patent number: 9863876
    Abstract: Provided herein is an apparatus including a photon emitter configured for reflecting photons from a surface of an article onto a first reflective surface. In addition, a second reflective surface is configured for reflecting photons from the surface of the article back onto the surface of the article. The apparatus also includes a detector configured to provide information corresponding to photons scattered from features of the article.
    Type: Grant
    Filed: November 6, 2015
    Date of Patent: January 9, 2018
    Assignee: Seagate Technology LLC
    Inventors: Joachim W. Ahner, David M. Tung, Stephen Keith McLaurin, Travis W. Grodt
  • RAMAN APPARATUS AND METHODS
    Publication number: 20160077009
    Abstract: Provided herein is an apparatus, including an excitation arm including excitation optics; a collection arm including collection optics, wherein the excitation arm and the collection arm are geometrically off-axis from one another for independent control of the excitation optics or the collection optics; and a full-surface spectroscopic analyzer to analyze a thin-film over an article from Raman-scattered light collected by the collection optics.
    Type: Application
    Filed: August 24, 2015
    Publication date: March 17, 2016
    Inventors: Daniel J. Gargas, David M. Tung, Travis W. Grodt, Joachim W. Ahner
  • REFLECTIVE SURFACES FOR SURFACE FEATURES OF AN ARTICLE
    Publication number: 20160069799
    Abstract: Provided herein is an apparatus including a photon emitter configured for reflecting photons from a surface of an article onto a first reflective surface. In addition, a second reflective surface is configured for reflecting photons from the surface of the article back onto the surface of the article. The apparatus also includes a detector configured to provide information corresponding to photons scattered from features of the article.
    Type: Application
    Filed: November 6, 2015
    Publication date: March 10, 2016
    Inventors: Joachim W. Ahner, David M. Tung, Stephen Keith McLaurin, Travis W. Grodt
  • Reflective surfaces for surface features of an article
    Patent number: 9217714
    Abstract: Provided herein is an apparatus, including a photon emitter configured for emitting photons onto a surface of an article; a first reflective surface and a second reflective surface configured to reflect the photons onto the surface of the article; and a processing means configured for processing signals from a photon detector array corresponding to photons scattered from surface features of the article.
    Type: Grant
    Filed: September 17, 2013
    Date of Patent: December 22, 2015
    Assignee: Seagate Technology LLC
    Inventors: Joachim W. Ahner, David M. Tung, Stephen Keith McLaurin, Travis W. Grodt
  • REFLECTIVE SURFACES FOR SURFACE FEATURES OF AN ARTICLE
    Publication number: 20140160481
    Abstract: Provided herein is an apparatus, including a photon emitter configured for emitting photons onto a surface of an article; a first reflective surface and a second reflective surface configured to reflect the photons onto the surface of the article; and a processing means configured for processing signals from a photon detector array corresponding to photons scattered from surface features of the article.
    Type: Application
    Filed: September 17, 2013
    Publication date: June 12, 2014
    Applicant: Seagate Technology LLC
    Inventors: Joachim W. Ahner, David M. Tung, Stephen Keith McLaurin, Travis W. Grodt