Patents by Inventor Trevor Henke

Trevor Henke has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Centrifugal spray processor and retrofit kit
    Patent number: 7305999
    Abstract: A centrifugal spray processor for processing semiconductor wafers uses larger numbers of spray nozzles. Each spray nozzle delivers a reduced volume of liquid, to reduce consumption of liquid process chemicals. The nozzles operate at a higher back pressure. The increased number of nozzles, offset nozzle patterns and groupings of nozzles, lower nozzle flow rates, and higher nozzle back pressures, provide improved processing results. The improved spray system may be provided as a retrofit kit.
    Type: Grant
    Filed: July 19, 2002
    Date of Patent: December 11, 2007
    Assignee: Semitool, Inc.
    Inventors: Trevor Henke, Craig Meuchel, Marvin Bernt
  • Centrifugal spray processor and retrofit kit
    Publication number: 20030102019
    Abstract: A centrifugal spray processor for processing semiconductor wafers uses larger numbers of spray nozzles. Each spray nozzle delivers a reduced volume of liquid, to reduce consumption of liquid process chemicals. The nozzles operate at a higher back pressure. The increased number of nozzles, offset nozzle patterns and groupings of nozzles, lower nozzle flow rates, and higher nozzle back pressures, provide improved processing results. The improved spray system may be provided as a retrofit kit.
    Type: Application
    Filed: July 19, 2002
    Publication date: June 5, 2003
    Applicant: Semitool, Inc.
    Inventors: Trevor Henke, Craig Meuchel, Marvin Bernt