Patents by Inventor Trigagema Gama

Trigagema Gama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CYCLICAL DEPOSITION METHODS AND STRUCTURES FORMED USING THE METHODS
    Publication number: 20240175124
    Abstract: Methods and systems for depositing a layer comprising silicon oxide on the substrate are disclosed. Exemplary methods include cyclical deposition methods that include providing a first silicon precursor to the reaction chamber, providing a second silicon precursor, and using a reactant or a non-reactant gas forming silicon oxide on a surface of the substrate. Exemplary methods can further include a treatment step.
    Type: Application
    Filed: February 7, 2024
    Publication date: May 30, 2024
    Inventors: Trigagema Gama, Ryu Nakano
  • Cyclical deposition methods
    Patent number: 11970769
    Abstract: Methods and systems for depositing a layer comprising silicon oxide on the substrate are disclosed. Exemplary methods include cyclical deposition methods that include providing a first silicon precursor to the reaction chamber, providing a second silicon precursor, and using a reactant or a non-reactant gas forming silicon oxide on a surface of the substrate. Exemplary methods can further include a treatment step.
    Type: Grant
    Filed: June 21, 2022
    Date of Patent: April 30, 2024
    Assignee: ASM IP Holding B.V.
    Inventors: Trigagema Gama, Ryu Nakano
  • CYCLICAL DEPOSITION METHODS AND STRUCTURES FORMED USING THE METHODS
    Publication number: 20230017874
    Abstract: Methods and systems for depositing a layer comprising silicon oxide on the substrate are disclosed. Exemplary methods include cyclical deposition methods that include providing a first silicon precursor to the reaction chamber, providing a second silicon precursor, and using a reactant or a non-reactant gas forming silicon oxide on a surface of the substrate. Exemplary methods can further include a treatment step.
    Type: Application
    Filed: June 21, 2022
    Publication date: January 19, 2023
    Inventors: Trigagema Gama, Ryu Nakano