Abstract: Methods and apparatus for controlling and delivering a vaporous element or compound, for example, selenium or sulfur, from a solid source to a work piece are provided. The methods and apparatus may be used in photovoltaic cell manufacturing. The apparatus may comprise a treatment chamber, for example, a box furnace or a tube furnace. The chamber may include an inner enclosure, an outer enclosure, and heating sources capable of independent thermal control, for example, in compliance with a predetermined heating schedule. The apparatus include devices and mechanisms for isolating the treatment chambers from the ambient environment. The methods and apparatus may be adapted to control metalloid vapor delivery in photovoltaic cell processing, for example, the processing of CIGS and CIGSS photovoltaic cells.

Abstract: A low-hydrogen photovoltaic cell is disclosed. The photovoltaic cell may contain less than 5% hydrogen. In one aspect, the photovoltaic cell may contain substantially no hydrogen, that is, the photovoltaic cell may be substantially hydrogen free. The photovoltaic cell includes a substrate and an absorber deposited on to the substrate. The absorber may typically include elements from group 11, group 12, and group 13 of the Periodic Table, for example, copper, indium, and gallium. The absorber may be treated with selenium and/or sulfur to produce a CIGS or CIGSS-type photovoltaic cell. The low-hydrogen photovoltaic cell may fabricated by a method and apparatus adapted to control metalloid vapor delivery, for example, in a low-hydrogen or hydrogen free atmosphere.

Abstract: Methods and apparatus for controlling and delivering a vaporous element or compound, for example, selenium or sulfur, from a solid source to a work piece are provided. The methods and apparatus may be used in photovoltaic cell manufacturing. The apparatus may comprise a treatment chamber, for example, a box furnace or a tube furnace. The chamber may include an inner enclosure, an outer enclosure, and heating sources capable of independent thermal control, for example, in compliance with a predetermined heating schedule. The apparatus include devices and mechanisms for isolating the treatment chambers from the ambient environment. The methods and apparatus may be adapted to control metalloid vapor delivery in photovoltaic cell processing, for example, the processing of CIGS and CIGSS photovoltaic cells.