Patents by Inventor Tsang-Sheau Lee

Tsang-Sheau Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for producing metal sputtering target
    Publication number: 20020083571
    Abstract: A method for producing metal sputtering target, comprising a step of double V melting process, and a step of high temperature forging. The step of double V melting process produces a single metal of aluminum, titanium, or copper, or an alloy of the single metal associated with at least a different metal selecting from one of copper, silicon, titanium, zirconium, osmium, molybdenum, tungsten, platinum, gold, niobium, tantalum, cobalt, rhenium, and scandium. The step of high temperature forging treats the single metal or the alloy to form the metal sputtering target material with small crystal grains and a secondary phase of fineness and high homogeneity suitable for using in semiconductor and photoelectric industries.
    Type: Application
    Filed: March 7, 2001
    Publication date: July 4, 2002
    Applicant: Solar Applied Material Technology Corp.
    Inventors: Tsang-Sheau Lee, Jium-Shyong Chen, Chien-Hung Yeh, Lee-Ho Chen, Chin-Hsiao Chao, Hung-Hua Chen