Patents by Inventor Tso-Lung Lai

Tso-Lung Lai has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of adjusting for parallel alignment between a shower head and a heater platform in a chamber used in integrated circuit fabrication
    Patent number: 6210754
    Abstract: A method is proposed for use in a chamber used in IC fabrication to adjust for parallel alignment between a shower head and a heater platform in the chamber, so that later the deposition process performed in the chamber can result in an evenly deposited layer on the wafer. This method is characterized by the provision of a plurality of displacement gauges between the shower head and the heater platform, with the heater platform being adjusted in such a manner as to allow all the distance readings from the displacement gauges to be substantially equal to a predetermined fixed value. This not only allows the shower head and the heater platform to be aligned and parallel to each other, but also allows them to be separated by a predetermined, fixed distance.
    Type: Grant
    Filed: February 8, 1999
    Date of Patent: April 3, 2001
    Assignee: United Microelectronics Corp.
    Inventors: Tsung-Lin Lu, Ping-Chung Chung, Tso-Lung Lai