Patents by Inventor Tsugiyuki Okuya

Tsugiyuki Okuya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Position measurement apparatus and method and pattern forming apparatus and writing method
    Patent number: 7640142
    Abstract: A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by the measurement unit, a second filter connected in parallel with the first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by the measurement unit, a third filter connected in series to the second filter with the series connection of the second and third filters connected in parallel with the first filter, configured to attenuate the first component of the certain frequency region of the measured value outputted by the measurement unit, and a processing unit configured to combine an output of the first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.
    Type: Grant
    Filed: July 26, 2006
    Date of Patent: December 29, 2009
    Assignee: NuFlare Technology, Inc.
    Inventors: Yuichi Tachikawa, Kazumichi Yasui, Kiyoshi Nakaso, Kiyoshi Hattori, Tsugiyuki Okuya, Makoto Mita
  • Position measurement apparatus and method and pattern forming apparatus and writing method
    Publication number: 20070024864
    Abstract: A position measurement apparatus includes a movable stage structure, a measurement unit using a laser to measure a moved position of the stage and to output a corresponding measured value, a first filter configured to attenuate a first component of a certain frequency region of the measured value outputted by said measurement unit, a second filter connected in parallel with said first filter configured to attenuate a second component other than the certain frequency region of the measured value outputted by said measurement unit, a third filter connected in series to said second filter with the series connection of said second and third filters connected in parallel with the first filter, configured to attenuate the first component of said certain frequency region of the measured value outputted by said measurement unit, and a synthetic unit configured to combine an output of said first filter and an output of the series connection of the second and third filters and to thereby output a first combined value.
    Type: Application
    Filed: July 26, 2006
    Publication date: February 1, 2007
    Applicant: NuFlare Technology, Inc.
    Inventors: Yuichi Tachikawa, Kazumichi Yasui, Kiyoshi Nakaso, Kiyoshi Hattori, Tsugiyuki Okuya, Makoto Mita