Abstract: A particle analyzer system that reduces size and cost, wherein particles are introduced into a cell, then the particles are irradiate in the cell with a laser beam, then atomic emission of the particles generated by the irradiation of the laser beam is transmitted, then a spectrum is obtained of the photo emission so transmitted, and the spectrum of the photo emission is detected and the wavelength of the laser beam is, other than the wavelength of the emission of the particles, is used to provide a filter to block the intrusion of the wavelength of the laser beam in a stage proceeding the photo emission.

Abstract: The present invention is applied to an analyzer according to which a sample to be analyzed is moved through a capillary tube in liquid chromatography or capillary-zone electrophoretic method. The capillary tube has a separation zone and a detection zone. The capillary tube in the detection zone has a section in which it can vibrate and both ends of this section are fixed.Analytes of the sample introduced into the analyzer are separated from each other in the separation zone. When each of the separated analytes is led to the area irradiated with beam in the detection zone, the capillary tube in the detection zone vibrates. This vibration phenomenon is brought about by tension fluctuation of the capillary tube caused by intermittent irradiation of the detection zone with an excitation beam and absorption of the excitation beam by the analyte. Concentration of analytes in the sample can be measured by detecting amplitude of the vibration.

Abstract: A photoacoustic cell, including a light guide having a fiber portion consisting of a bundle of a number of optical fibers and a covering portion by which the side surface of the fiber portion is covered, the covering portion of the light guide extending beyond the fiber portion in a manner that when a first end of the light guide is brought into contact with the surface of a material to be measured, a closed space is defined by the end surface of the fiber portion, by the inner wall of the covering portion, and by the surface of the material to be measured; a pipe having a first end that is open in the closed space and a second end that penetrates through the covering portion and is open toward the outside of the covering portion; and a microphone that is coupled to the second end of the pipe, and a photoacoustic measuring device including this photoacoustic cell.

Abstract: A method and apparatus are disclosed for detection of surface defects and internal defect information of a sample, such as a semiconductor device, using the photoacoustic effect. Operationally, an intensity-modulated laser beam is provided having a predetermined desired frequency. The intensity-modulated laser beam is focused on the sample thereby inducing said photoacoustic effect inside the sample which is detected in two-dimensional directions of the sample so as to compose a two-dimensional photoacoustic image of the excited sample. Surface and internal information of the sample is then extracted from the two-dimensional photoacoustic image and an inverse filtering factor is in turn computed on the basis of a thermal impulse response of the particular sample for compensating degradation of the resolution of the actual photoacoustic image obtained. Lastly, the computed inverse filtering factor is then applied to the detected photoacoustic image to arrive at an image having greatly improved resolution.

Abstract: A medium including particles to be analyzed is contained in a cell through which excitation rays are passed. The excitation rays are focused and have a predetermined wave form. A period in time of the excitation rays is set substantially equal to and preferably longer than the attenuation time of an acoustic pulse which is generated when the excitation rays are absorbed in the particle and when the particle release heat. The acoustic pulse is used to analyze particle size and number of particles.

Abstract: A photoacoustic analyzer comprises an analyzing cell having a beam entrance window and including a cylindrical piezoelectric transducer element forming at least a part of the wall thereof, and a laser beam emitter emitting a laser beam directed toward and into the analyzing cell through the beam entrance window. In the photoacoustic analyzer, the ratio r/r.sub.o between the radius r of the inner side of the analyzing cell and the radius r.sub.o of the incident laser beam is selected to lie within the range of 1.ltoreq.r/r.sub.o .ltoreq.8.