Abstract: An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and blocks the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate. In the thickness direction of the substrate, a thickness dimension of the transmitting piezoelectric film is smaller than a thickness dimension of the receiving piezoelectric film.

Abstract: A displacement magnifying device includes a diaphragm structure including a substrate and a diaphragm provided separately from the substrate, actuators provided side by side with the diaphragm structure, and a first member including displacing sections coupled to both ends of the actuators and displaced according to displacement of the actuators. The displacing sections are coupled to the diaphragm of the diaphragm structure.

Abstract: A diaphragm compressor includes first structure having a first pressing part, a first diaphragm, and a first substrate partially separated from the first diaphragm and partially joined to the first diaphragm, a second structure having a second pressing part, a second diaphragm, and a second substrate partially separated from the second diaphragm and partially joined to the second diaphragm, the first structure and the second structure being stacked in a stacking direction in which the first diaphragm and the first substrate are stacked, wherein the first pressing part is placed at sides of the first diaphragm opposite to the first substrate, and a first separation portion between the first diaphragm and the first substrate is part of a first channel in which a fluid flows, the second pressing part is placed at sides of the second diaphragm opposite to the second substrate, and a second separation portion between the second diaphragm and the second substrate is part of a second channel in which a fluid flows,

Abstract: A diaphragm-type compressor includes a substrate, a diaphragm, and an actuator, the substrate, the diaphragm, and the actuator being laminated and provided in this order. In a plan view from a direction of the lamination, the diaphragm includes a first film section that overlaps the actuator and a second film section that does not overlap the actuator. A step is provided on a surface at the diaphragm side of the substrate. A portion corresponding to the first film section and a portion corresponding to the second film section of the substrate are respectively different stages.

Abstract: A structure according to an embodiment includes a first substrate including a first valve and a second substrate joined to the first substrate. The structure includes a region where the first valve and the second substrate are not joined. A sticking suppressing section is provided in at least one of the first valve and the second substrate in the region. By configuring the structure in this way, it is possible to suppress sticking of the first valve to the second substrate in the structure including the first substrate including the first valve and the second substrate joined to the first substrate.

Abstract: A diaphragm-type compressor includes a substrate, an actuator, a diaphragm provided between the substrate and the actuator, and a case in which the diaphragm, the actuator, and the substrate are provided. A recessed section formed at the actuator side of the substrate and the actuator overlap in a plan view. The case has an inflow port of fluid further on the actuator side than the substrate based on the position of the diaphragm. The substrate includes a suction port for causing the recessed section to suck the fluid.

Abstract: A diaphragm compressor includes first structure having a first pressing part, a first diaphragm, and a first substrate partially separated from the first diaphragm and partially joined to the first diaphragm, a second structure having a second pressing part, a second diaphragm, and a second substrate partially separated from the second diaphragm and partially joined to the second diaphragm, the first structure and the second structure being stacked in a stacking direction in which the first diaphragm and the first substrate are stacked, wherein the first pressing part is placed at sides of the first diaphragm opposite to the first substrate, and a first separation portion between the first diaphragm and the first substrate is part of a first channel in which a fluid flows, the second pressing part is placed at sides of the second diaphragm opposite to the second substrate, and a second separation portion between the second diaphragm and the second substrate is part of a second channel in which a fluid flows,

Abstract: A displacement magnifying device includes a diaphragm structure including a substrate and a diaphragm provided separately from the substrate, actuators provided side by side with the diaphragm structure, and a first member including displacing sections coupled to both ends of the actuators and displaced according to displacement of the actuators. The displacing sections are coupled to the diaphragm of the diaphragm structure.

Abstract: A structure according to an embodiment includes a first substrate including a first valve and a second substrate joined to the first substrate. The structure includes a region where the first valve and the second substrate are not joined. A sticking suppressing section is provided in at least one of the first valve and the second substrate in the region. By configuring the structure in this way, it is possible to suppress sticking of the first valve to the second substrate in the structure including the first substrate including the first valve and the second substrate joined to the first substrate.

Abstract: A diaphragm-type compressor includes a substrate, a diaphragm, and an actuator, the substrate, the diaphragm, and the actuator being laminated and provided in this order. In a plan view from a direction of the lamination, the diaphragm includes a first film section that overlaps the actuator and a second film section that does not overlap the actuator. A step is provided on a surface at the diaphragm side of the substrate. A portion corresponding to the first film section and a portion corresponding to the second film section of the substrate are respectively different stages.

Abstract: A diaphragm-type compressor includes a substrate, an actuator, a diaphragm provided between the substrate and the actuator, and a case in which the diaphragm, the actuator, and the substrate are provided. A recessed section formed at the actuator side of the substrate and the actuator overlap in a plan view. The case has an inflow port of fluid further on the actuator side than the substrate based on the position of the diaphragm. The substrate includes a suction port for causing the recessed section to suck the fluid.

Abstract: A cooling device of an optical element includes a circulation passage through which a fluid circulates. The circulation passage includes a window portion that is disposed on an incidence side or an emission side of the optical element and transmits light, an evaporation portion that is connected to the window portion and includes a plurality of channel portions, and a heat radiation portion that radiates heat of the fluid. The fluid transmits the light in a liquid state. The fluid is a liquid in the window portion. The fluid that is a liquid evaporates to vapor in the plurality of channel portions. The fluid that is vapor condenses into a liquid in the heat radiation portion. A sectional area of each channel portion is less than a sectional area of a boundary between the window portion and the evaporation portion.

Abstract: An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and blocks the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate. In the thickness direction of the substrate, a thickness dimension of the transmitting piezoelectric film is smaller than a thickness dimension of the receiving piezoelectric film.

Abstract: An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and closes the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and that is sandwiched between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and that is sandwiched between a pair of electrodes in an intersecting direction intersecting with the thickness direction of the substrate.

Abstract: A piezoelectric element which includes a vibrating film, a piezoelectric body disposed on one surface of the vibrating film, and a horizontal electrode structure in which electrodes are disposed at a predetermined gap therebetween on the piezoelectric body. The vibrating film includes a recess portion in a portion corresponding to the predetermined gap in plan view.

Abstract: A cooling device of an optical element includes a circulation passage through which a fluid circulates. The circulation passage includes a window portion that is disposed on an incidence side or an emission side of the optical element and transmits light, an evaporation portion that is connected to the window portion and includes a plurality of channel portions, and a heat radiation portion that radiates heat of the fluid. The fluid transmits the light in a liquid state. The fluid is a liquid in the window portion. The fluid that is a liquid evaporates to vapor in the plurality of channel portions. The fluid that is vapor condenses into a liquid in the heat radiation portion. A sectional area of each channel portion is less than a sectional area of a boundary between the window portion and the evaporation portion.

Abstract: A piezoelectric element includes a vibrating film, a piezoelectric body, a first electrode, a second electrode, and a groove. The piezoelectric body is arranged upon the vibrating film. The first electrode is arranged upon the piezoelectric body. The second electrode is arranged upon the piezoelectric body and at a position that is separated from the first electrode. The groove is located between the first electrode and the second electrode and splits a surface of the piezoelectric body in two, as seen in plan view from a thickness direction of the vibrating film.

Abstract: An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and closes the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and that is sandwiched between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and that is sandwiched between a pair of electrodes in an intersecting direction intersecting with the thickness direction of the substrate.

Abstract: A receiving transducer includes: a flexible portion; a piezoelectric film provided on the flexible portion; a first electrode provided between a first surface of the flexible portion, on which the piezoelectric body is provided, and a second surface of the piezoelectric film that is a surface not facing the flexible portion; and a second electrode that is provided between the first and second surfaces and that faces the first electrode with a gap interposed therebetween in plan view as viewed from the thickness direction of the flexible portion.

Abstract: A piezoelectric element which includes a vibrating film, a piezoelectric body disposed on one surface of the vibrating film, and a horizontal electrode structure in which electrodes are disposed at a predetermined gap therebetween on the piezoelectric body. The vibrating film includes a recess portion in a portion corresponding to the predetermined gap in plan view.