Patents by Inventor Tsukasa Sawaki

Tsukasa Sawaki has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 4938859
    Abstract: In a high frequency ion plating device, when an evaporation substrate is intended to be rotated to form a uniform evaporated film, a variation in resistance of a contact in a rotating portion arises, making it almost impossible to provide a constant duration of high frequency discharge.A supply of a high frequency power to the substrate is effected through an auxiliary electrode such as a coil, and a dc voltage is induced in the auxiliary electrode and applied to the substrate simultaneously with a high frequency voltage. As a result of the coil the high frequency discharge is stabilized, and a stabilized supply of power is rendered possible.
    Type: Grant
    Filed: July 30, 1985
    Date of Patent: July 3, 1990
    Assignee: Vacuum Optics Corporation of Japan
    Inventors: Yoshio Ide, Masahiro Mori, Ryo Yoshida, Masaaki Miyake, Tsukasa Sawaki, Kazuo Hara