Patents by Inventor Tsung Chi Chang

Tsung Chi Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11982944
    Abstract: A method of lithography process is provided. The method includes forming a conductive layer over a reticle. The method includes applying ionized particles to the reticle by a discharging device. The method includes forming a photoresist layer over a semiconductor substrate. The method includes securing the semiconductor substrate by a wafer electrostatic-clamp. The method also includes patterning the photoresist layer by emitting radiation from a radiation source via the reticle.
    Type: Grant
    Filed: May 31, 2023
    Date of Patent: May 14, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsiao-Lun Chang, Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng, Che-Chang Hsu
  • Patent number: 8025455
    Abstract: A fixing device for an extension tube of an exercise includes an outer tube and an inner tube received in the outer tube, wherein the extension tube extends through the inner tube. A quick release device laterally mounted to an outer periphery of the outer tube. The quick release device extends through the outer tube and the inner tube to quickly fixing/releasing the extension tube when adjusting the stretching distance of the extension tube.
    Type: Grant
    Filed: September 24, 2009
    Date of Patent: September 27, 2011
    Inventors: Hsuan Fu Huang, Tsung Chi Chang, Shang-Wei Yeh
  • Publication number: 20110070021
    Abstract: A fixing device for an extension tube of an exercise includes an outer tube and an inner tube received in the outer tube, wherein the extension tube extends through the inner tube. A quick release device laterally mounted to an outer periphery of the outer tube. The quick release device extends through the outer tube and the inner tube to quickly fixing/releasing the extension tube when adjusting the stretching distance of the extension tube.
    Type: Application
    Filed: September 24, 2009
    Publication date: March 24, 2011
    Inventors: Hsuan Fu Huang, Tsung Chi Chang, Shang-Wei Yeh