Abstract: An entire fluid supply line or an entire fluid controller constituted by a plurality of fluid control devices is precisely monitored. A fluid controller G accumulating and having a plurality of fluid control devices A. The fluid control devices A include an operation information acquisition mechanism acquiring an operation information in the fluid control devices, an identification information storage 71 storing a self-identification information, and a communication processing unit 72 transmitting the operation information acquired by the operation information acquisition mechanism to an external terminal with the self-identification information stored in the identification information storage 71 at different timings for each of the fluid control devices A.

Abstract: A diaphragm valve includes a valve body that defines a flow path through which fluid flows and an opening that opens to the outside in a middle of flow path; a flexible partition member that covers the opening and separates the flow path from the outside, and changes a cross-sectional area of the flow path; and a flexible support member disposed on a rear surface side opposite to a flow path side of the flexible partition member. A housing is fixed to the valve body via peripheral portions of the flexible partition member and the flexible support member. A humidity sensor that detects a state of an atmosphere or a change thereof in a space defined by the flexible support member and an inner surface of the housing. The diaphragm valve is capable of preventing fluid in a diaphragm valve from leaking to the outside due to breakage of a diaphragm.

Abstract: A flow-path forming block includes: a first block; a second block attached to the first block, the second block having a first flow path and a second flow path; and a gasket provided between the first block and the second block, the gasket being configured to seal between the first block and the second block, wherein the second block has a communication portion formed on a surface facing the gasket, the communication portion being configured such that the first flow path and the second flow path are communicated, and the gasket has a recessed portion formed at a position facing the communication portion.

Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

Abstract: Provided is a fluid control device that is compact and that enables data regarding an internal operation of the device to be acquired. A fluid control device V is disposed in a flow path of a fluid and enables data regarding an internal operation to be acquired, the fluid control device including a sensor hood 44 to which one or more sensors M2 for detecting an operation in the fluid control device are attached; a valve body 1 connected to the sensor hood; a diaphragm 42 held below the sensor hood, inside the valve body; a cover portion 5 that covers the outer periphery of the sensor hood; and a circuit board 60 that is electrically connected to the sensor(s) and for which a thickness direction of the circuit board and a flow path direction are arranged in the same direction on the inside of the cover portion.

Abstract: A fluid control device includes: a joint block defining a fluid flow path open to an upper surface thereof, and which has an engaging portion on the bottom surface side thereof; a support member having a guide portion which restrains the joint block on the upper surface while permitting the joint block to move in longitudinal direction; and a fluid device fixed to the upper surface of the joint block. The support member is provided with at least one plunger such that the tip end portion protrudes from the upper surface of the support member. A recess is provided in the bottom surface of the joint block, and the recess engages with the tip end portion of the plunger to set the position of the joint block in the longitudinal direction.

Abstract: An electromagnetic valve has an inlet port and an outlet port. The electromagnetic valve is configured to open and close a driving fluid passage communicating the inlet port and the outlet port. The electromagnetic valve includes: a housing; a solenoid that includes a bobbin having a coil wound therearound; a moving core that is provided on an axis of the bobbin and is disposed movably in an axial direction; a stationary core that is provided on the axis of the bobbin and is fixed in the housing; and a valve that is configured to be movable together with the moving core and opens and closes the driving fluid passage. The inlet port is opened on one surface side of the housing in the axial direction of the bobbin while the outlet port is opened on the other surface side of the housing in the axial direction of the bobbin.

Abstract: A valve V1 capable of detecting an operation abnormality has a magnet M1 that is attached in the vicinity of a pressing adapter 52 of a stem 53 that slides according to an opening/closing operation of the valve V1, and a magnetic sensor M2 that is attached to a surface acing the stem 53, inside the pressing adapter 52 that presses a peripheral edge of a diaphragm 51, and detects a change in a distance between the magnet M1 and the magnetic sensor M2. Further, an abnormality determination mechanism compares the change in the distance between the magnet M1 and the magnetic sensor M2 at the time of abnormality diagnosis detected by the magnetic sensor M2 and a previously measured change in the distance between the magnet M and the magnetic sensor M2 at the time of normality, and determines whether or not there is an abnormality.

Abstract: A fluid control device 10 comprises a valve device V2 including actuators 22 and 24 for opening and closing a flow path and adjusting a flow rate of a fluid flowing through the flow path, a pressure sensor PT provided upstream of the valve device V2, and a control circuit 12 connected to the valve device V2 and the pressure sensor PT, and the control circuit 12 controls an operation of the actuator based on a pressure measured by the pressure sensor PT and a reference pressure drop curve, while the upstream side of the fluid control device is closed and the valve device is opened using the actuators.

Abstract: A valve device includes: a body formed with a valve chamber, a first inflow passage, a second inflow passage, an outflow passage, and an annular groove and provided with a valve seat; and a diaphragm configured to communicate with and interrupt the second inflow passage and the outflow passage. An end portion of the second inflow passage is open to the valve chamber. The valve seat is provided on a peripheral edge of a location where the valve chamber and the second inflow passage communicate with each other. The annular groove is open to the valve chamber and is formed around the second inflow passage. An end portion of the outflow passage is open to the annular groove. The first inflow passage has a plurality of flow passages including an inflow port and a plurality of outflow ports, and each outflow port is open to the annular groove.

Abstract: A work management apparatus, method, and system enable to accurately manage position, tightening torque and other information for all fastening parts, for tightening work using a tool with a torque sensor. The system includes: a driver provided with a torque sensor; and first and second cameras that capture images of a product from different viewpoints. The torque sensor starts measurement of the tightening torque when a detected tightening torque exceeds a set threshold value, stops measurement of the tightening torque when the measurement data satisfies a predetermined condition, and outputs torque related data that includes measurement time. The system further includes: a PC that calculates coordinates of an engagement position of a bit from a plurality of image data captured by the first and the second cameras corresponding to the measurement time included in the torque related data; and a marker mounting device provided with a marker and removably mounted to the bit.

Abstract: [Problem] To provide a valve system capable of monitoring in real time a mass of gas supplied from a valve that is periodically opened and closed, and that is capable of adjusting the output mass of gas supplied from the valve to be close to a target mass. [Solution] The valve system operates a main actuator 60 to make a diaphragm periodically open and close a flow path (step S2), calculate an output mass of fluid that passes through the a between the diaphragm and a valve seat and output from the diaphragm valve based on displacement data detected by a displacement sensor (step S3), determines an adjustment lift amount based on the calculated output mass, and adjusts a lift amount Lf of the diaphragm 20 by the determined adjustment lift amount (step S4).

Abstract: A valve which can accurately detect an operation of the valve is provided. The valve includes a valve body defining a fluid flow passage, a valve disk operating to be able to open and close the fluid flow passage, an actuator driving the valve disk by supplying or interrupting a working fluid, a stem transmitting a driving force of the actuator to the valve disk, a detection means detecting an opening and closing operation of the valve disk, and an elastic member fixing a ring-shaped magnetic body inserted through an end of the stem to the stem. The detection means includes the magnetic body fixed by the elastic member, and a magnetic sensor detecting a change in a magnetic field of the magnetic body.

Abstract: A valve device capable of precisely adjusting a flow rate includes: an operating member for operating a diaphragm and provided movably between a closed position at which diaphragm closes a flow path and an open position at which diaphragm opens the flow path; a main actuator that receives pressure from a supplied drive fluid and moves the operating member to the open position or the closed position; an adjusting actuator for adjusting the position of the operating member positioned in the open position by using a passive element which expands and contracts in response to a given input signal; a position detecting mechanism for detecting the position of the operating member with respect to a valve body; and an origin position determining unit that uses a valve closed state in which the diaphragm contacts to valve seat to determine an origin position of the position detecting mechanism.

Abstract: A tool is equipped with a torque sensor, suited for a tightening task of a fastening component of a device such as a fluid control system that requires a large number of fastening components for assembly and has a narrow space for access to the fastening components, and capable of automatically detecting a tightening torque. The tool includes a torque sensor capable of detecting a tightening torque for tightening a fastening component acting on a bit. The torque sensor initiates measurement of the tightening torque when the tightening torque detected exceeds a set threshold value, completes measurement when the tightening torque detected falls below the set threshold value and a set time elapses, and outputs torque-related data formed on the basis of measurement data from measurement initiation to measurement completion and including a measurement time. The torque-related data includes a peak value of the measurement data.

Abstract: A fluid supply device and a fluid supply method capable of stably supplying a supercritical fluid includes a fluid supply device for supplying a fluid in a liquid state before being changed to a supercritical fluid toward a processing chamber. The fluid supply device comprises a condenser that condenses and liquefies a fluid in a gas state, a tank that stores the fluid condensed and liquefied by the condenser, a pump that pressure-feeds the liquefied fluid stored in the tank toward the processing chamber, and a heating means provided to a flow path communicating with a discharge side of the pump and for partially changing the liquid in the flow path to a supercritical fluid.

Abstract: A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.

Abstract: A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

Abstract: An operation information collection system for a fluid control device configured as an operation information collection module includes a detected value acquisition unit acquiring a detected value of a state change or a device operation able to detect opening/closing operations from the fluid control device, a calculation processing unit calculating a rate of change of detected values separated by a predetermined time based on the detected value, and an operation information registration unit registering the rate of change of the detected values separated by the predetermined time to an operation information storage unit as an operation information of the fluid control device.

Abstract: A valve device is capable of precisely adjusting a flow rate variation with time, aging, or the like without using an external sensor or using as few external sensors as possible. The apparatus includes an adjusting actuator for adjusting the position of the operating member positioned at the open position, a communication unit for receiving adjustment information relating to the adjustment of the opening degree of the flow path by the valve element from the outside of the apparatus, and a control unit for adjusting the position of the operating member by driving the adjusting actuator based on the adjustment information.