Abstract: An apparatus comprising: a first input that receives a first rotational speed information of a windmill mechanically generated by a mechanical rotation detection unit; a second input that receives a second rotational speed information of the windmill based on an alternating current output of a generator attached to the windmill; and a controller configured to compare the first and second rotational speed information, to determine whether a difference between the first and second rotational speed information is greater than a predetermined value and to execute a predetermined anomaly processing in response to the difference being greater than the predetermined value.

Abstract: An apparatus comprising: a first input that receives a first rotational speed information of a windmill mechanically generated by a mechanical rotation detection unit; a second input that receives a second rotational speed information of the windmill based on an alternating current output of a generator attached to the windmill; and a controller configured to compare the first and second rotational speed information, to determine whether a difference between the first and second rotational speed information is greater than a predetermined value and to execute a predetermined anomaly processing in response to the difference being greater than the predetermined value.

Abstract: A power supply unit inclding a battery 4 that stores electric power used for operations of various devices; a dynamo 19, a rotation support mechanism 14, and a rectifying section 32 as charging means that converts natural energy into electric energy and supplies electric power of the electric energy to the battery 4 to be charged; a charging control section 36 for changing over between supply and stop of the electric power from the charging means to the storage means; and a charging control driving unit 45 and a low-voltage charging function of an arithmetic processing part 51 as charging changeover control means that controls the charging control section 36 such that supply and stop of the electric power are repeated when the charging voltage for charging the battery 4 with electric power is not less than a predetermined value, and continues supply of the electric power when the charging voltage is less than the predetermined value.

Abstract: A power supply unit of the invention comprises a battery 4 that stores electric power used for operations of various devices; a dynamo 19, a rotation support mechanism 14, and a rectifying section 32 as charging means that converts natural energy into electric energy and supplies electric power of the electric energy to the battery 4 to be charged; a charging control section 36 for changing over between supply and stop of the electric power from the charging means to the storage means; and a charging control driving unit 45 and a low-voltage charging function of an arithmetic processing part 51 as charging changeover control means that controls the charging control section 36 such that supply and stop of the electric power are repeated when the charging voltage for charging the battery 4 with electric power is not less than a predetermined value, and continues supply of the electric power when the charging voltage is less than the predetermined value.

Abstract: A transporting apparatus using a linear motor comprises at least a primary unit and a secondary unit. The primary unit faces the secondary unit with a predetermined gap. The primary unit consists of a core and coils supplied with three-phase alternating currents so that the primary unit generates a progressive magnetic field. The secondary unit at least includes a core and permanent magnets. These permanent magnets are magnetized so that each section of the secondary unit is magnetized in a north pole and a south pole in turn along a longtitudinal direction thereof. Hence, the primary unit can be transported along the secondary unit by controlling the currents supplied to the primary unit.

Abstract: A railway carrier apparatus for semiconductor wafers which are contained in a wafer cassette is disclosed. This railway carrier apparatus includes: a carrier for carrying the wafer cassette; a guide rail, disposed along a line of travel of the carrier, for supporting the carrier to guide the carrier along the line of travel; and a drive mechanism for driving the carrier along the line of travel. The carrier includes; a carrier body slidably connected to the guide rail for movement along the guide rail; and a bedplate member, mounted on the carrier body, for supporting the wafer cassette on its upper face. The upper face of the bedplate member is inclined with respect to a horizontal plane in such a manner that one of its opposite side edges is positioned at a higher level than the other side edge.

Abstract: The present invention is related to a linear motor which is composed of mainly:(a) an elongated primary magnetic member for generating a traveling magnetic field traveling along the length;(b) a secondary magnetic member for generating a stationary magnetic field, the secondary magnetic means having an elongated core, pair of permanent magnets attached to the core so as to sandwich the core from upper and lower sides, each pair being spaced constantly from each other, direction of polarity of the magnets forming a pair coinciding to each other, direction of polarity interchanging in turn from one pair to another; and(c) a support member supporting one of the primary magnetic member and the secondary magnetic member against the other so that the former is slidable along its axis against the latter.

Abstract: There is disclosed a dusttight storage cabinet apparatus used for storing works such as wafer cassettes for containing semiconductor wafers. The storage cabinet apparatus includes: a housing having an entrance, formed in its front wall, for allowing works to come in and go out of the housing therethrough; an air supply duct for supplying the inside of the housing with clean air; a vertical rotation shaft rotatably disposed in the housing for turning about its longitudinal axis; a drive motor for turning the rotation shaft; and a rack assembly of a substantially cylindrical structure. The rack assembly is coaxially secured to the rotation shaft and has a plurality of compartments for storing the works therewithin. The compartments open radially outward and are partitioned off from one another so as to prevent cross contamination by dust among the compartments.