Abstract: Plasma source assemblies, gas distribution assemblies including the plasma source assembly and methods of generating plasma are described. The plasma source assemblies include a powered electrode with a ground electrode adjacent a first side, a first dielectric adjacent a second side of the powered electrode and at least one second dielectric adjacent the first dielectric on a side opposite the first dielectric. The sum of the thicknesses of the first dielectric and each of the second dielectrics is in the range of about 10 mm to about 17 mm.

Abstract: A multilayer electronic component includes first, second, and third ceramic layers, first and second inner electrodes, and a via-electrode. The first, second and third ceramic layers are sequentially stacked on each other. The first inner electrode is sandwiched between the first and second ceramic layers. The second inner electrode is sandwiched between the second and third ceramic layers. The via-electrode electrically connects the first and second inner electrodes. A projection is integrally provided with the via-electrode. The projection projects from the via-electrode towards an outer peripheral direction and is inserted into the second ceramic layer in a layered arrangement.

Abstract: A plasma source assembly for use with a processing chamber includes an inner RF feed connected to the inner edge of the electrode and an outer RF feed connected to the outer edge of the electrode. A capacitor is connected between the inner edge of the electrode and electrical ground to modulate the voltage of across the length of the electrode.

Abstract: Plasma source assemblies comprising an RF hot electrode having a body and at least one return electrode spaced from the RF hot electrode to provide a gap in which a plasma can be formed. An RF feed is connected to the RF hot electrode at a distance from the inner peripheral end of the RF hot electrode that is less than or equal to about 25% of the length of the RF hot electrode. The RF hot electrode can include a leg and optional triangular portion near the leg that extends at an angle to the body of the RF hot electrode. A cladding material on one or more of the RF hot electrode and the return electrode can be variably spaced or have variable properties along the length of the plasma gap.

Abstract: Apparatus and methods for depositing and treating or etching a film are described. A batch processing chamber includes a plurality of processing regions with at least one plasma processing region. A low frequency bias generator is connected to a susceptor assembly to intermittently apply a low frequency bias to perform a directional treatment or etching the deposited film.

Abstract: Apparatus and methods of processing a substrate in a plasma enhanced spatial atomic layer deposition chamber. A substrate is moved through one or more plasma processing regions and one or more non-plasma processing regions while the plasma power is pulsed to prevent a voltage differential on the substrate from exceeding a breakdown voltage of the substrate or device being formed on the substrate.

Abstract: An electronic apparatus includes a first processor configured to restrict direct memory access by one or more peripheral circuits to a volatile memory, and thereafter make a transition from an active state to a sleep state, and a second processor configured to, after the first processor has been brought into the sleep state, set the volatile memory into a self-refresh mode in which a refresh circuit of the volatile memory periodically rewrites data stored in the volatile memory, and thereafter reboot the electronic apparatus.

Abstract: To provide an electronic percussion that ensures reproducing further faithful musical sound relative to a hitting operation by a player. An electronic percussion 100 includes a thin plate-shaped head 101 at an opening formed into a shape of a cylinder with a closed bottom and respective pressure sensor 106 and signal processing device 110 on a bottom 102a. A surface of the head 101 constitutes a struck surface 101a. The head 101 includes a vibration sensor 103 on the back surface. The vibration sensor 103 includes a pressure sensor pressing body 105 on the pressure sensor 106 side. The pressure sensor pressing body 105 is formed to have a tapered shape whose outer diameter gradually thins from the vibration sensor 103 side to the pressure sensor 106 side. The signal processing device 110 outputs a musical sound signal representing a musical sound using respective detection signals of the vibration sensor 103 and the pressure sensor 106.

Abstract: A multilayer electronic component includes first, second, and third ceramic layers, first and second inner electrodes, and a via-electrode. The first, second and third ceramic layers are sequentially stacked on each other. The first inner electrode is sandwiched between the first and second ceramic layers. The second inner electrode is sandwiched between the second and third ceramic layers. The via-electrode electrically connects the first and second inner electrodes. A projection is integrally provided with the via-electrode. The projection projects from the via-electrode towards an outer peripheral direction and is inserted into the second ceramic layer in a layered arrangement.

Abstract: A multilayer electronic component includes outer electrodes each including an outer electrode main body electrically conducted to an internal electrode and entering portions that project from the outer electrode main body as a base end and enter into the electronic component element through an end surface of the electronic component element. The entering portions each include a slope relative to a principal surface in a flat region including a major portion of the internal electrode.

Abstract: A controller of a printing apparatus is configured to determine whether there is a stack-full tray, restrict discharging of the printing sheet to the stack-full tray and reduce the number of copies made in the sort printing process, store the page number of the page currently printed in association with a stack-full tray, obtain image data corresponding to the page associated with the stack-full tray onwards when it is determined that the full stack status of the stack-full trays is released, and the obtained print images with making the tray of which status is changed from the full status to the non-full status.

Abstract: To provide an electronic percussion that ensures reproducing further faithful musical sound relative to a hitting operation by a player. An electronic percussion 100 includes a thin plate-shaped head 101 at an opening formed into a shape of a cylinder with a closed bottom and respective pressure sensor 106 and signal processing device 110 on a bottom 102a. A surface of the head 101 constitutes a struck surface 101a. The head 101 includes a vibration sensor 103 on the back surface. The vibration sensor 103 includes a pressure sensor pressing body 105 on the pressure sensor 106 side. The pressure sensor pressing body 105 is formed to have a tapered shape whose outer diameter gradually thins from the vibration sensor 103 side to the pressure sensor 106 side. The signal processing device 110 outputs a musical sound signal representing a musical sound using respective detection signals of the vibration sensor 103 and the pressure sensor 106.

Abstract: An electronic percussion includes: a plate-shaped head constituting a struck surface beaten by a player; a frame formed into an annular frame shape surrounding an outer edge of the head, the frame holding the head via the outer edge; and a hitting sensor configured to detect at least one of a vibration and a pressure generated by hitting of the head to output an electrical signal. The frame includes: a first holding groove formed into a groove shape at an inner surface of the frame, the outer edge of the head being engaged with the first holding groove such that the head is held; and a second holding groove formed into a groove shape at a position adjacent to and along the first holding groove such that the second holding groove communicates with the first holding groove, the second holding groove having a depth deeper than a depth of the first holding groove.

Abstract: An electronic percussion includes: a plate-shaped head constituting a struck surface beaten by a player; a frame formed into an annular frame shape surrounding an outer edge of the head, the frame holding the head via the outer edge; and a hitting sensor configured to detect at least one of a vibration and a pressure generated by hitting of the head to output an electrical signal. The frame includes: a first holding groove formed into a groove shape at an inner surface of the frame, the outer edge of the head being engaged with the first holding groove such that the head is held; and a second holding groove formed into a groove shape at a position adjacent to and along the first holding groove such that the second holding groove communicates with the first holding groove, the second holding groove having a depth deeper than a depth of the first holding groove.

Abstract: Apparatus and methods to control the phase of power sources for plasma process regions in a batch process chamber. A master exciter controls the phase of the power sources during the process sequence based on feedback from the match circuits of the respective plasma sources.

Abstract: Embodiments of the present invention generally relate to apparatus for reducing arcing and parasitic plasma in substrate processing chambers. The apparatus generally include a processing chamber having a substrate support, a backing plate, and a showerhead disposed therein. A showerhead suspension electrically couples the backing plate to the showerhead. An electrically conductive bracket is coupled to the backing plate and spaced apart from the showerhead. The electrically conductive bracket may include a plate, a lower portion, an upper portion, and a vertical extension. The electrically conductive bracket contacts an electrical isolator.

Abstract: Embodiments of the present invention generally relate to apparatus for reducing arcing and parasitic plasma in substrate processing chambers. The apparatus generally include a processing chamber having a substrate support, a backing plate, and a showerhead disposed therein. A showerhead suspension electrically couples the backing plate to the showerhead. An electrically conductive bracket is coupled to the backing plate and spaced apart from the showerhead. The electrically conductive bracket may include a plate, a lower portion, an upper portion, and a vertical extension. The electrically conductive bracket contacts an electrical isolator.

Abstract: A transmission line RF applicator apparatus and method for coupling RF power to a plasma in a plasma chamber. The apparatus comprises two conductors, one of which has a plurality of apertures. In one aspect, apertures in different portions of the conductor have different sizes, spacing or orientations. In another aspect, adjacent apertures at successive longitudinal positions are offset along the transverse dimension. In another aspect, the apparatus comprises an inner conductor and one or two outer conductors. The main portion of each of the one or two outer conductors includes a plurality of apertures that extend between an inner surface and an outer surface of the outer conductor.