Patents by Inventor Tsuyoshi Umemoto
Tsuyoshi Umemoto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9603228Abstract: A discharge lamp lighting apparatus includes an inverter circuit supplying an AC voltage to a discharge lamp and a resonant circuit that increases a supply voltage supplied to the discharge lamp. The inverter circuit is driven using a first frequency including a resonant frequency of the resonant circuit during a first period in which breakdown and a glow discharge are generated, driven using a second frequency including a resonant frequency of the resonant circuit, lower than the first frequency, during a second period in which an arc discharge is generated, and driven using a third frequency lower than the second frequency, during a third period. Further, a dead time is set in which both of a high-side switching device and a low-side switching device are turned off so that the dead time is longer in the second period than in the first period and the third period.Type: GrantFiled: November 13, 2015Date of Patent: March 21, 2017Assignee: MURATA MANUFACTURING CO., LTD.Inventors: Tsuyoshi Umemoto, Takafumi Toda
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Publication number: 20160165704Abstract: A discharge lamp lighting apparatus includes an inverter circuit supplying an AC voltage to a discharge lamp and a resonant circuit that increases a supply voltage supplied to the discharge lamp. The inverter circuit is driven using a first frequency including a resonant frequency of the resonant circuit during a first period in which breakdown and a glow discharge are generated, driven using a second frequency including a resonant frequency of the resonant circuit, lower than the first frequency, during a second period in which an arc discharge is generated, and driven using a third frequency lower than the second frequency, during a third period. Further, a dead time is set in which both of a high-side switching device and a low-side switching device are turned off so that the dead time is longer in the second period than in the first period and the third period.Type: ApplicationFiled: November 13, 2015Publication date: June 9, 2016Inventors: Tsuyoshi UMEMOTO, Takafumi TODA
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Patent number: 7125730Abstract: In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.Type: GrantFiled: September 4, 2003Date of Patent: October 24, 2006Assignee: Hitachi High-Technologies CorporationInventors: Youji Takahashi, Tsutomu Iida, Tsuyoshi Umemoto, Makoto Kashibe
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Patent number: 6713885Abstract: In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.Type: GrantFiled: February 26, 2002Date of Patent: March 30, 2004Assignee: Hitachi High-Technologies CorporationInventors: Youji Takahashi, Tsutomu Iida, Tsuyoshi Umemoto, Makoto Kashibe
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Publication number: 20040056706Abstract: In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.Type: ApplicationFiled: September 4, 2003Publication date: March 25, 2004Inventors: Youji Takahashi, Tsutomu Iida, Tsuyoshi Umemoto, Makoto Kashibe
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Patent number: 6674356Abstract: The number of layers of a secondary winding of a flyback transformer for use in a PWM controlled high-tension voltage generator is increased to six or higher. The distributed capacitance of the flyback transformer is thus decreased, the frequency of ringing is increased, and the pulse width of a flyback pulse is narrowed. The timing of the on-operation of a control FET is expedited, and the input current to the flyback transformer is lowered. A compact and power-saving flyback transformer thus results.Type: GrantFiled: August 13, 2001Date of Patent: January 6, 2004Assignee: Murata Manufacturing Co., Ltd.Inventors: Kenji Naito, Hisashi Takiguchi, Masaru Omura, Tadao Nagai, Masahiko Kitamoto, Tsuyoshi Umemoto
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Publication number: 20030162309Abstract: In power supply and a semiconductor making apparatus and a semiconductor fabricating method using the same, an abnormality can be detected when an offset occurs in a part constituting a closed-loop system of high-frequency power supply or dc power supply for a semiconductor making apparatus. Power supply for receiving a power value setting signal to set strength of power and a power on/off instruction to set on or off of outputting of the power interrupts the supply of the power even in a state in which a subsequent power on/off instruction is on if a power sense signal according to a value obtained by sensing the power exceeds a predetermined value when the power on/off instruction is off.Type: ApplicationFiled: February 26, 2002Publication date: August 28, 2003Inventors: Youji Takahashi, Tsutomu Iida, Tsuyoshi Umemoto, Makoto Kashibe
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Patent number: 6586887Abstract: A high-frequency power supply apparatus for a plasma generation apparatus having a modulator for generating an intermittent high-frequency output on the basis of a modulation reference signal and a peak value setting signal, the high-frequency power supply apparatus having: a first control loop for comparing the peak value of the intermittent high-frequency output detected by a peak value detector with a preset peak value of the high-frequency output so that the output controller controls the peak value of the high-frequency output to be the preset peak value; and a second control loop for calculating an average value of the intermittent high-frequency output based on the preset peak setting value and a preset duty ratio setting value and generating a modulation reference signal for controlling the modulator on the basis of the average value of the high-frequency output detected by a monitor and the average value of the high-frequency output.Type: GrantFiled: March 6, 2002Date of Patent: July 1, 2003Assignee: Hitachi High-Technologies CorporationInventors: Yasuo Oogoshi, Youji Takahashi, Tadamitsu Kanekiyo, Tsuyoshi Umemoto
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Patent number: 6434022Abstract: A high voltage generation circuit including a transformer, the transformer having a primary winding having a primary inductance; a power supply for supplying a voltage to the primary winding of the transformer; a switching element for controlling current flowing through the primary winding of the transformer from the power supply; and a resonance capacitor which resonates with the primary winding of the transformer when the switching element is off, so that a flyback pulse is generated. The circuit has a distributed inductance and a resonance capacitance. The switching element is controlled so as to be switched on nearly at the bottom of a quiescent ringing pulse which is produced by a resonance of the primary inductance of the transformer with a capacitance included in a circuit connected to the primary winding of the transformer, after the flyback pulse is generated.Type: GrantFiled: August 20, 2001Date of Patent: August 13, 2002Assignee: Murata Manufacturing Co., Ltd.Inventors: Kenji Naito, Hisashi Takiguchi, Tadao Nagai, Masahiko Kitamoto, Tsuyoshi Umemoto
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Publication number: 20020074956Abstract: The number of layers of a secondary winding of a flyback transformer for use in a PWM controlled high-tension voltage generator is increased to six or higher. The distributed capacitance of the flyback transformer is thus decreased, the frequency of ringing is increased, and the pulse width of a flyback pulse is narrowed. The timing of the on-operation of a control FET is expedited, and the input current to the flyback transformer is lowered. A compact and power-saving flyback transformer thus results.Type: ApplicationFiled: August 13, 2001Publication date: June 20, 2002Applicant: Murata Manufacturing Co., Ltd.Inventors: Kenji Naito, Hisashi Takiguchi, Masaru Omura, Tadao Nagai, Masahiko Kitamoto, Tsuyoshi Umemoto
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Publication number: 20020067625Abstract: A high voltage generation circuit comprising a transformer, the transformer having a primary winding having a primary inductance; a power supply for supplying a voltage to the primary winding of the transformer; a switching element for controlling current flowing through the primary winding of the transformer from the power supply; and a resonance capacitor which resonates with the primary winding of the transformer when the switching element is off, so that a flyback pulse is generated. The circuit has a distributed inductance and a resonance capacitance. The switching element is controlled so as to be switched on nearly at the bottom of a quiescent ringing pulse which is produced by a resonance of the primary inductance of the transformer with a capacitance included in a circuit connected to the primary winding of the transformer, after the flyback pulse is generated.Type: ApplicationFiled: August 20, 2001Publication date: June 6, 2002Applicant: Murata Manufacturing Co., Ltd.Inventors: Kenji Naito, Hisashi Takiguchi, Tadao Nagai, Masahiko Kitamoto, Tsuyoshi Umemoto
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Patent number: 5861601Abstract: The present invention relates to a microwave plasma processing apparatus, suited for generating a plasma by using microwaves, and a processing method. Microwaves propagated through a circular waveguide are tuned in the space thereof by a microwave tuner that is installed to match the impedance, and are introduced in a uniform and most efficient state into a discharge block having a plasma-resistant inner surface that is enlarged in a tapered form through a microwave introduction window. Then, a processing gas controlled to a predetermined pressure by a gas supplying structure and gas evacuating structure is turned into a plasma which is more uniform and is more dense by interaction of a microwave electric field that is efficiently introduced and a magnetic field produced by a solenoid coil.Type: GrantFiled: November 14, 1994Date of Patent: January 19, 1999Assignee: Hitachi, Ltd.Inventors: Yoshiaki Sato, Mitsuru Katamoto, Hironobu Kawahara, Minoru Soraoka, Tsuyoshi Umemoto, Hideki Kihara, Katsuyoshi Kudo, Tooru Yukimasa, Hirofumi Kakutani