Patents by Inventor Tuneo Hiyama

Tuneo Hiyama has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for measuring volatile hydrides
    Patent number: 4447543
    Abstract: According to the present invention volatile hydrides such as diborane, arsine, phosphine and the like are made to react with mercuric oxide at room temperature to produced mercury atom, the concentration of which is thereafter measured and the concentration of volatile hydrides is determined in accordance with the corresponding measured mercury atom concentration. As the measuring apparatus according to the present invention is made to measure mercury atom, it can easily detect even extremely small quantity of substances such as volatile hydrides and respond quickly, thus enabling the apparatus to be suitably used as a monitor in semiconductor industry.
    Type: Grant
    Filed: November 18, 1981
    Date of Patent: May 8, 1984
    Assignee: Nippon Sanso K.K.
    Inventors: Hikaru Harada, Teruo Akiyama, Tuneo Hiyama
  • Apparatus for measuring volatile hydrides
    Patent number: 4309385
    Abstract: According to the present invention volatile hydrides such as diborane, arsine, phosphine and the like are made to react with mercuric oxide at an ordinary temperature to produce mercury atoms, the concentration of which is thereafter measured and the concentration of volatile hydrides is determined in accordance with the corresponding measured mercury atom concentration. As the measuring apparatus according to the present invention is made to measure mercury atoms, it can easily detect even extremely small quantity of substances such as volatile hydrides and respond quickly, thus enabling the apparatus being suitably used as a monitor in the semiconductor industry.
    Type: Grant
    Filed: January 4, 1980
    Date of Patent: January 5, 1982
    Assignee: Nippon Sanso K.K.
    Inventors: Hikaru Harada, Teruo Akiyama, Tuneo Hiyama