Abstract: An IC tag includes a plane coil which is made by a conductor wire coated with an insulator wound several times in a plane, the plane coil having terminal portions and defining a central vacant area encircled by the wound wires. A semiconductor element is arranged in the central vacant area and placed in the plane and having a thickness substantially same as or smaller than a thickness of the plane coil, the semiconductor element having electrodes which are electrically connected to the terminal portions of the plane coil.

Abstract: An IC tag includes a plane coil which is made by a conductor wire coated with an insulator wound several times in a plane, the plane coil having terminal portions and defining a central vacant area encircled by the wound wires. A semiconductor element is arranged in the central vacant area and placed in the plane and having a thickness substantially same as or smaller than a thickness of the plane coil, the semiconductor element having electrodes which are electrically connected to the terminal portions of the plane coil.

Abstract: A multi-section Roots vacuum pump of the reverse-flow cooling type having a plurality of pump sections each having rotors fixed to two common shafts. The pump includes a housing in each of the pump sections having an inlet and an outlet for a gas to be pumped and enclosing the rotors, a peripheral gas passages arranged around the housing, and a peripheral coolant water passages arraged around the peripheral gas passages. The gas flowing through the inlet into the housing and delivered through the outlet is supplied to the peripheral gas passages to be cooled there, and at least a portion of the cooled gas is returned into the housing. The remaining portions of the gas which are not returned into the housing in the pump sections except for the last pump section are supplied to the inlet of the next pump section through the peripheral gas passage.

Abstract: A multi-section vacuum pump includes a pump portion, an intermediate shaft portion provided between the pump portion and an external drive shaft, a drive shaft portion including a drive shaft having a drive gear for driving the intermediate shaft portion and a shaft seal structure on the drive shaft, and a gear box accommodating the timing gear set, the intermediate gear, and the drive gear and allowing the lubricating oil to be reserved at the bottom thereof. The drive shaft portion includes, at the bottom of the drive shaft in the shaft seal structure, oil supply for supplying lubricating oil to an oil reservoir having an oil overflow opening communicating with the gear box, a lubricating oil path for introducing the lubricating oil reservoir being provided having an oil overflow opening communicating with the gear box, a lubricating oil path for introducing the lubrication oil to the oil reservoir being provided inside the drive shaft.