Patents by Inventor Tutomu Shinya

Tutomu Shinya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer conveying system in a clean room
    Patent number: 5443346
    Abstract: Disclosed is a wafer conveying system for a clean room which is high in wafer conveying efficiency, and makes it possible to achieve a variety of processing operations with high efficiency.
    Type: Grant
    Filed: July 2, 1993
    Date of Patent: August 22, 1995
    Assignee: Shinko Electric Co., Ltd.
    Inventors: Masanao Murata, Teppei Yamashita, Tsuyoshi Tanaka, Takahide Hoshiko, Mitsuji Karita, Hitoshi Kawano, Tutomu Shinya