Abstract: The present invention relates to a substrate conveyance apparatus (200). The apparatus includes a main frame (230), a substrate support device (240) and a base plate (210). The substrate support device includes robot blades (141a, 141b) and a holding chuck (145). The holding chuck is movably connected with main frame so as to hold the robot blades. The robot blades are comprised of two pair of plate-shaped members, and the base plate is used to support the main frame. The distance between one pair of plate-shaped members is different from that of the other pair of plate-shaped members. The substrate conveyance apparatus is used to load/unload the substrates with different sizes.

Abstract: A cassette (100) for accommodating substrates includes a frame (110) and supporting members (120). The frame includes a top shelf (111) and a bottom shelf (112), which cooperatively defines a space therebetween. The top and bottom shelves each include at least two adjusting members (114) with positioning slots (115). Each of the adjusting members includes a positioning slot and a plurality of keyways (116) in communication with the positioning slot. The supporting members oppositely disposed in the space, and at least one of them includes a pair of adjusting shafts (124) movable along the positioning slots and removeably engaging in the selected of the keyways of the adjusting members. With this configuration, it enables easy adjustment of the distance between opposite supporting members. In the adjusting process, no part need be detached from the cassette.