Patents by Inventor Tzu Chung TSAI

Tzu Chung TSAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240087932
    Abstract: An apparatus having a first portion including a first front wall, a first rear wall, and a bottom wall integrally coupled to the first front wall and the first rear wall, and pivotal pin structures integrally coupled to and extending from the first rear wall. The apparatus includes a second portion having a second front wall, a second rear wall, and a top wall integrally coupled to the second front wall and the second rear wall, and pin holders integrally coupled to and extending from the second rear wall and at an offset angle with reference to the top wall. The pivotal pin structure includes a base support connected to the first rear wall and a shaft connected to the base support, and the pin holder defines an opening sized and shaped to accept the shaft. The first and second portions are sized and shaped to be pivotally movable between open and closed configurations.
    Type: Application
    Filed: November 20, 2023
    Publication date: March 14, 2024
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tzu-Chung TSAI, Ping-Cheng KO, Fang-yu LIU, Jhih-Yuan YANG
  • Patent number: 11923403
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip (IC). The IC comprises a substrate. A resistor overlies the substrate. The resistor comprises a first metal nitride structure, a second metal nitride structure spaced from the first metal nitride structure, and a metal structure disposed between the first metal nitride structure and the second metal nitride structure. A first dielectric structure is disposed over the substrate and the resistor.
    Type: Grant
    Filed: August 27, 2021
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Szu-Hsien Lo, Che-Hung Liu, Tzu-Chung Tsai
  • Patent number: 11908838
    Abstract: A three-dimensional device structure includes a first die including a first semiconductor substrate, a second die disposed on the first die and including a second semiconductor substrate, a dielectric encapsulation (DE) layer disposed on the first die and surrounding the second die, a redistribution layer structure disposed on the second die and the DE layer, and an integrated passive device (IPD) embedded in the DE layer and electrically connected to the first die and the redistribution layer structure.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: February 20, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jen-Yuan Chang, Chien-Chang Lee, Chia-Ping Lai, Tzu-Chung Tsai
  • Patent number: 11881421
    Abstract: An apparatus having a first portion including a first front wall, a first rear wall, and a bottom wall integrally coupled to the first front wall and the first rear wall, and pivotal pin structures integrally coupled to and extending from the first rear wall. The apparatus includes a second portion having a second front wall, a second rear wall, and a top wall integrally coupled to the second front wall and the second rear wall, and pin holders integrally coupled to and extending from the second rear wall and at an offset angle with reference to the top wall. The pivotal pin structure includes a base support connected to the first rear wall and a shaft connected to the base support, and the pin holder defines an opening sized and shaped to accept the shaft. The first and second portions are sized and shaped to be pivotally movable between open and closed configurations.
    Type: Grant
    Filed: March 29, 2021
    Date of Patent: January 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tzu-Chung Tsai, Ping-Cheng Ko, Fang-yu Liu, Jhih-Yuan Yang
  • Patent number: 11855130
    Abstract: A three-dimensional device structure includes a die including a semiconductor substrate, an interconnect structure disposed on the semiconductor substrate, a through silicon via (TSV) structure that extends through the semiconductor substrate and electrically contacts a metal feature of the interconnect structure, and an integrated passive device (IPD) embedded in the semiconductor substrate and electrically connected to the TSV structure.
    Type: Grant
    Filed: August 26, 2021
    Date of Patent: December 26, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jen-Yuan Chang, Chien-Chang Lee, Chia-Ping Lai, Tzu-Chung Tsai
  • Publication number: 20230387184
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip (IC). The IC comprises a substrate. A resistor overlies the substrate. The resistor comprises a first metal nitride structure, a second metal nitride structure spaced from the first metal nitride structure, and a metal structure disposed between the first metal nitride structure and the second metal nitride structure. A first dielectric structure is disposed over the substrate and the resistor.
    Type: Application
    Filed: August 7, 2023
    Publication date: November 30, 2023
    Inventors: Szu-Hsien Lo, Che-Hung Liu, Tzu-Chung Tsai
  • Publication number: 20230386972
    Abstract: A die includes: a semiconductor substrate having a front side and an opposing back side; a dielectric structure including a substrate oxide layer disposed on the front side of the semiconductor substrate and interlayer dielectric (ILD) layers disposed on the substrate oxide layer; an interconnect structure disposed in the dielectric structure; a through-silicon via (TSV) structure extending in a vertical direction from the back side of the semiconductor substrate through the front side of the semiconductor substrate, such that a first end of the TSV structure is disposed in the interconnect structure; and a TSV barrier structure including a barrier line that contacts the first end of the TSV structure, and a first seal ring disposed in the substrate oxide layer and that surrounds the TSV structure in a lateral direction perpendicular to the vertical direction.
    Type: Application
    Filed: August 3, 2023
    Publication date: November 30, 2023
    Inventors: Jen-Yuan CHANG, Chia-Ping LAI, Shih-Chang CHEN, Tzu-Chung TSAI, Chien-Chang LEE
  • Publication number: 20230378247
    Abstract: A three-dimensional device structure includes a die including a semiconductor substrate, an interconnect structure disposed on the semiconductor substrate, a through silicon via (TSV) structure that extends through the semiconductor substrate and electrically contacts a metal feature of the interconnect structure, and an integrated passive device (IPD) embedded in the semiconductor substrate and electrically connected to the TSV structure.
    Type: Application
    Filed: August 2, 2023
    Publication date: November 23, 2023
    Inventors: Jen-Yuan CHANG, Chien-Chang LEE, Chia-Ping LAI, Tzu-Chung TSAI
  • Publication number: 20230352448
    Abstract: A semiconductor device includes a first semiconductor die mounted on a substrate, a second semiconductor die mounted on the substrate and separated from the first semiconductor die, a first dielectric material between the first semiconductor die and the second semiconductor die and having a first density, and a column of second dielectric material in the first dielectric material, the second dielectric material having a second density different than the first density, and the second dielectric material including a void region.
    Type: Application
    Filed: July 3, 2023
    Publication date: November 2, 2023
    Inventors: Jen-Yuan Chang, Tzu-Chung Tsai
  • Publication number: 20230345847
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip. A first conductive structure overlies a substrate. A second conductive structure overlies the first conductive structure. A data storage structure is disposed between the first and second conductive structures. The data storage structure includes a first dielectric layer, a second dielectric layer, and a third dielectric layer. Respective bandgaps of the first, second, and third dielectric layers are different from one another.
    Type: Application
    Filed: June 15, 2023
    Publication date: October 26, 2023
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Cheng-Yuan Tsai, Tzu-Chung Tsai, Fa-Shen Jiang
  • Patent number: 11742325
    Abstract: A semiconductor device includes a first semiconductor die mounted on a substrate, a second semiconductor die mounted on the substrate and separated from the first semiconductor die, a first dielectric material between the first semiconductor die and the second semiconductor die and having a first density, and a column of second dielectric material in the first dielectric material, the second dielectric material having a second density different than the first density, and the second dielectric material including a void region.
    Type: Grant
    Filed: August 31, 2021
    Date of Patent: August 29, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Jen-Yuan Chang, Tzu-Chung Tsai
  • Patent number: 11721794
    Abstract: A method for manufacturing reflective structure is provided. The method includes the operations as follows. A metallization structure is received. A plurality of conductive pads are formed over the metallization structure. A plurality of dielectric stacks are formed over the conductive pads, respectively, wherein the thicknesses of the dielectric stacks are different. The dielectric stacks are isolated by forming a plurality of trenches over a plurality of intervals between each two adjacent dielectric stacks.
    Type: Grant
    Filed: February 18, 2022
    Date of Patent: August 8, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Chia-Hua Lin, Yao-Wen Chang, Chii-Ming Wu, Cheng-Yuan Tsai, Eugene I-Chun Chen, Tzu-Chung Tsai
  • Patent number: 11716913
    Abstract: Various embodiments of the present disclosure are directed towards a method for forming an integrated chip. The method includes forming a lower conductive structure over a substrate. A data storage structure is formed on the lower conductive structure. A bandgap of the data storage structure discretely increases or decreases at least two times from a top surface of the data storage structure in a direction towards the substrate. An upper conductive structure is formed on the data storage structure.
    Type: Grant
    Filed: April 12, 2022
    Date of Patent: August 1, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Cheng-Yuan Tsai, Tzu-Chung Tsai, Fa-Shen Jiang
  • Publication number: 20230146080
    Abstract: A base structure in an electroplating system is provided. The base structure includes: includes: an annular member; a contact ring attached to an inner surface of the annular member and configured to be electrically connected to a wafer in an electroplating process; and a pair of shield structures attached to an upper surface of the annular member and extending in an vertical direction. Each of the pair of shield structures includes: a curved plate comprising a plurality of discharging openings, wherein plating solution residual is discharged through the plurality of discharging openings in a cleaning procedure; and a plurality of bevels, each of the plurality of bevels corresponding to each of the plurality of discharging openings and configured to guide the plating solution residual toward the corresponding discharging opening in the cleaning procedure.
    Type: Application
    Filed: February 24, 2022
    Publication date: May 11, 2023
    Inventors: Chia-Sheng Lai, Chun-Yuan Hsu, Tzu-Chung Tsai
  • Publication number: 20230069315
    Abstract: A three-dimensional device structure includes a die including a semiconductor substrate, an interconnect structure disposed on the semiconductor substrate, a through silicon via (TSV) structure that extends through the semiconductor substrate and electrically contacts a metal feature of the interconnect structure, and an integrated passive device (IPD) embedded in the semiconductor substrate and electrically connected to the TSV structure.
    Type: Application
    Filed: August 26, 2021
    Publication date: March 2, 2023
    Inventors: Jen-Yuan CHANG, Chien-Chang LEE, Chia-Ping LAI, Tzu-Chung TSAI
  • Publication number: 20230069496
    Abstract: A semiconductor device includes a first semiconductor die mounted on a substrate, a second semiconductor die mounted on the substrate and separated from the first semiconductor die, a first dielectric material between the first semiconductor die and the second semiconductor die and having a first density, and a column of second dielectric material in the first dielectric material, the second dielectric material having a second density different than the first density, and the second dielectric material including a void region.
    Type: Application
    Filed: August 31, 2021
    Publication date: March 2, 2023
    Inventors: Jen-Yuan CHANG, Tzu-Chung TSAI
  • Publication number: 20230069542
    Abstract: Various embodiments of the present disclosure are directed towards an integrated chip (IC). The IC comprises a substrate. A resistor overlies the substrate. The resistor comprises a first metal nitride structure, a second metal nitride structure spaced from the first metal nitride structure, and a metal structure disposed between the first metal nitride structure and the second metal nitride structure. A first dielectric structure is disposed over the substrate and the resistor.
    Type: Application
    Filed: August 27, 2021
    Publication date: March 2, 2023
    Inventors: Szu-Hsien Lo, Che-Hung Liu, Tzu-Chung Tsai
  • Publication number: 20230066372
    Abstract: A three-dimensional device structure includes a first die including a first semiconductor substrate, a second die disposed on the first die and including a second semiconductor substrate, a dielectric encapsulation (DE) layer disposed on the first die and surrounding the second die, a redistribution layer structure disposed on the second die and the DE layer, and an integrated passive device (IPD) embedded in the DE layer and electrically connected to the first die and the redistribution layer structure.
    Type: Application
    Filed: August 26, 2021
    Publication date: March 2, 2023
    Inventors: Jen-Yuan CHANG, Chien-Chang LEE, Chia-Ping LAI, Tzu-Chung TSAI
  • Patent number: 11527717
    Abstract: Various embodiments of the present disclosure are directed towards a memory cell including a co-doped data storage structure. A bottom electrode overlies a substrate and a top electrode overlies the bottom electrode. The data storage structure is disposed between the top and bottom electrodes. The data storage structure comprises a dielectric material doped with a first dopant and a second dopant.
    Type: Grant
    Filed: March 3, 2020
    Date of Patent: December 13, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hai-Dang Trinh, Chii-Ming Wu, Hsing-Lien Lin, Tzu-Chung Tsai, Fa-Shen Jiang, Bi-Shen Lee
  • Patent number: 11527713
    Abstract: The present disclosure, in some embodiments, relates to a memory device. The memory device includes a bottom electrode disposed over a lower interconnect within a lower inter-level dielectric (ILD) layer over a substrate. A data storage structure is over the bottom electrode. A first top electrode layer is disposed over the data storage structure, and a second top electrode layer is on the first top electrode layer. The second top electrode layer is less susceptible to oxidation than the first top electrode layer. A top electrode via is over and electrically coupled to the second top electrode layer.
    Type: Grant
    Filed: July 6, 2020
    Date of Patent: December 13, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bi-Shen Lee, Hai-Dang Trinh, Hsun-Chung Kuang, Tzu-Chung Tsai, Yao-Wen Chang