Patents by Inventor Tzu-Hsuan Yeh
Tzu-Hsuan Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240170076Abstract: A memory device, such as a 3D AND flash memory, includes a memory cell block, a word line driver, and a plurality of bit line switches. The word line driver has a plurality of complementary transistor pairs for respectively generating a plurality of word line signals for a plurality of word lines. Substrates of a first transistor and a second transistor of each of the complementary transistor pairs respectively receive a first voltage and a second voltage. Each of the bit line switches includes a third transistor. A substrate of the third transistor receives a third voltage. The first voltage, the second voltage, and the third voltage are constant static voltages during a soft program operation and a soft program verify operation.Type: ApplicationFiled: November 17, 2022Publication date: May 23, 2024Applicant: MACRONIX International Co., Ltd.Inventors: Teng-Hao Yeh, Hang-Ting Lue, Tzu-Hsuan Hsu, Chen-Huan Chen, Ken-Hui Chen
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Publication number: 20240162088Abstract: An integrated circuit device includes an interconnect layer, a memory structure, a third conductive feature, and a fourth conductive feature. The interconnect layer includes a first conductive feature and a second conductive feature. The memory structure is over and in contact with the first conductive feature. The memory structure includes at least a resistance switching element over the first conductive feature. The third conductive feature, including a first conductive line, is over and in contact with the second conductive feature. The fourth conductive feature is over and in contact with the memory structure. The fourth conductive feature includes a second conductive line, a top surface of the first conductive line is substantially level with a top surface of the second conductive line, and a bottom surface of the first conductive line is lower than a bottommost portion of a bottom surface of the second conductive line.Type: ApplicationFiled: January 25, 2024Publication date: May 16, 2024Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsia-Wei CHEN, Fu-Ting SUNG, Yu-Wen LIAO, Wen-Ting CHU, Fa-Shen JIANG, Tzu-Hsuan YEH
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Patent number: 11894267Abstract: A method for fabricating an integrated circuit device is provided. The method includes forming an interconnect layer over a substrate, wherein the interconnect layer has a first interlayer dielectric layer, a first conductive feature in a first portion of the first interlayer dielectric layer, and a second conductive feature in a second portion of the first interlayer dielectric layer; depositing a dielectric layer over the interconnect layer; removing a first portion of the dielectric layer over the first conductive feature and the first portion of the first interlayer dielectric layer, and remaining a second portion of the dielectric layer over the second conductive feature and the second portion of the first interlayer dielectric layer; and forming a memory structure over the first conductive feature.Type: GrantFiled: January 5, 2021Date of Patent: February 6, 2024Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsia-Wei Chen, Fu-Ting Sung, Yu-Wen Liao, Wen-Ting Chu, Fa-Shen Jiang, Tzu-Hsuan Yeh
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Patent number: 11824022Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a bond pad disposed over a substrate and a passivation structure disposed over the substrate and the bond pad. The passivation structure has one or more sidewalls directly over the bond pad. A protective layer is disposed directly between the passivation structure and the bond pad. The passivation structure extends from directly over the protective layer to laterally past a sidewall of the protective layer that faces a central region of the bond pad.Type: GrantFiled: February 1, 2022Date of Patent: November 21, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu
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Publication number: 20230369260Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a plurality of interconnects disposed within a dielectric structure over a substrate. A conductor is disposed over at least one of the plurality of interconnects. A protective layer is disposed on the conductor and a mask layer is disposed on the protective layer. One or more passivation layers are disposed on the mask layer. The protective layer, the mask layer, and the one or more passivation layers respectively have one or more sidewalls directly over the conductor.Type: ApplicationFiled: July 24, 2023Publication date: November 16, 2023Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu
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Publication number: 20220216106Abstract: A method for fabricating an integrated circuit device is provided. The method includes forming an interconnect layer over a substrate, wherein the interconnect layer has a first interlayer dielectric layer, a first conductive feature in a first portion of the first interlayer dielectric layer, and a second conductive feature in a second portion of the first interlayer dielectric layer; depositing a dielectric layer over the interconnect layer; removing a first portion of the dielectric layer over the first conductive feature and the first portion of the first interlayer dielectric layer, and remaining a second portion of the dielectric layer over the second conductive feature and the second portion of the first interlayer dielectric layer; and forming a memory structure over the first conductive feature.Type: ApplicationFiled: January 5, 2021Publication date: July 7, 2022Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Hsia-Wei CHEN, Fu-Ting SUNG, Yu-Wen LIAO, Wen-Ting CHU, Fa-Shen JIANG, Tzu-Hsuan YEH
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Publication number: 20220157751Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a bond pad disposed over a substrate and a passivation structure disposed over the substrate and the bond pad. The passivation structure has one or more sidewalls directly over the bond pad. A protective layer is disposed directly between the passivation structure and the bond pad. The passivation structure extends from directly over the protective layer to laterally past a sidewall of the protective layer that faces a central region of the bond pad.Type: ApplicationFiled: February 1, 2022Publication date: May 19, 2022Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu
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Patent number: 11244914Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a bond pad layer onto a dielectric structure formed over a substrate. The dielectric structure surrounds a plurality of interconnect layers. A protective layer is formed onto the bond pad layer, and the bond pad layer and the protective layer are patterned to define a bond pad covered by the protective layer. One or more upper passivation layers are formed over the protective layer. A dry etching process is performed to form an opening extending through the one or more upper passivation layers to the protective layer. A wet etching process is performed to remove a part of the protective layer and expose an upper surface of the bond pad.Type: GrantFiled: May 5, 2020Date of Patent: February 8, 2022Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu
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Publication number: 20210351142Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a bond pad layer onto a dielectric structure formed over a substrate. The dielectric structure surrounds a plurality of interconnect layers. A protective layer is formed onto the bond pad layer, and the bond pad layer and the protective layer are patterned to define a bond pad covered by the protective layer. One or more upper passivation layers are formed over the protective layer. A dry etching process is performed to form an opening extending through the one or more upper passivation layers to the protective layer. A wet etching process is performed to remove a part of the protective layer and expose an upper surface of the bond pad.Type: ApplicationFiled: May 5, 2020Publication date: November 11, 2021Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu