Patents by Inventor Tzu-Hsuan Yeh

Tzu-Hsuan Yeh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240170076
    Abstract: A memory device, such as a 3D AND flash memory, includes a memory cell block, a word line driver, and a plurality of bit line switches. The word line driver has a plurality of complementary transistor pairs for respectively generating a plurality of word line signals for a plurality of word lines. Substrates of a first transistor and a second transistor of each of the complementary transistor pairs respectively receive a first voltage and a second voltage. Each of the bit line switches includes a third transistor. A substrate of the third transistor receives a third voltage. The first voltage, the second voltage, and the third voltage are constant static voltages during a soft program operation and a soft program verify operation.
    Type: Application
    Filed: November 17, 2022
    Publication date: May 23, 2024
    Applicant: MACRONIX International Co., Ltd.
    Inventors: Teng-Hao Yeh, Hang-Ting Lue, Tzu-Hsuan Hsu, Chen-Huan Chen, Ken-Hui Chen
  • Publication number: 20240162088
    Abstract: An integrated circuit device includes an interconnect layer, a memory structure, a third conductive feature, and a fourth conductive feature. The interconnect layer includes a first conductive feature and a second conductive feature. The memory structure is over and in contact with the first conductive feature. The memory structure includes at least a resistance switching element over the first conductive feature. The third conductive feature, including a first conductive line, is over and in contact with the second conductive feature. The fourth conductive feature is over and in contact with the memory structure. The fourth conductive feature includes a second conductive line, a top surface of the first conductive line is substantially level with a top surface of the second conductive line, and a bottom surface of the first conductive line is lower than a bottommost portion of a bottom surface of the second conductive line.
    Type: Application
    Filed: January 25, 2024
    Publication date: May 16, 2024
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsia-Wei CHEN, Fu-Ting SUNG, Yu-Wen LIAO, Wen-Ting CHU, Fa-Shen JIANG, Tzu-Hsuan YEH
  • Patent number: 11894267
    Abstract: A method for fabricating an integrated circuit device is provided. The method includes forming an interconnect layer over a substrate, wherein the interconnect layer has a first interlayer dielectric layer, a first conductive feature in a first portion of the first interlayer dielectric layer, and a second conductive feature in a second portion of the first interlayer dielectric layer; depositing a dielectric layer over the interconnect layer; removing a first portion of the dielectric layer over the first conductive feature and the first portion of the first interlayer dielectric layer, and remaining a second portion of the dielectric layer over the second conductive feature and the second portion of the first interlayer dielectric layer; and forming a memory structure over the first conductive feature.
    Type: Grant
    Filed: January 5, 2021
    Date of Patent: February 6, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsia-Wei Chen, Fu-Ting Sung, Yu-Wen Liao, Wen-Ting Chu, Fa-Shen Jiang, Tzu-Hsuan Yeh
  • Patent number: 11824022
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a bond pad disposed over a substrate and a passivation structure disposed over the substrate and the bond pad. The passivation structure has one or more sidewalls directly over the bond pad. A protective layer is disposed directly between the passivation structure and the bond pad. The passivation structure extends from directly over the protective layer to laterally past a sidewall of the protective layer that faces a central region of the bond pad.
    Type: Grant
    Filed: February 1, 2022
    Date of Patent: November 21, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu
  • Publication number: 20230369260
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a plurality of interconnects disposed within a dielectric structure over a substrate. A conductor is disposed over at least one of the plurality of interconnects. A protective layer is disposed on the conductor and a mask layer is disposed on the protective layer. One or more passivation layers are disposed on the mask layer. The protective layer, the mask layer, and the one or more passivation layers respectively have one or more sidewalls directly over the conductor.
    Type: Application
    Filed: July 24, 2023
    Publication date: November 16, 2023
    Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu
  • Publication number: 20220216106
    Abstract: A method for fabricating an integrated circuit device is provided. The method includes forming an interconnect layer over a substrate, wherein the interconnect layer has a first interlayer dielectric layer, a first conductive feature in a first portion of the first interlayer dielectric layer, and a second conductive feature in a second portion of the first interlayer dielectric layer; depositing a dielectric layer over the interconnect layer; removing a first portion of the dielectric layer over the first conductive feature and the first portion of the first interlayer dielectric layer, and remaining a second portion of the dielectric layer over the second conductive feature and the second portion of the first interlayer dielectric layer; and forming a memory structure over the first conductive feature.
    Type: Application
    Filed: January 5, 2021
    Publication date: July 7, 2022
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Hsia-Wei CHEN, Fu-Ting SUNG, Yu-Wen LIAO, Wen-Ting CHU, Fa-Shen JIANG, Tzu-Hsuan YEH
  • Publication number: 20220157751
    Abstract: The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a bond pad disposed over a substrate and a passivation structure disposed over the substrate and the bond pad. The passivation structure has one or more sidewalls directly over the bond pad. A protective layer is disposed directly between the passivation structure and the bond pad. The passivation structure extends from directly over the protective layer to laterally past a sidewall of the protective layer that faces a central region of the bond pad.
    Type: Application
    Filed: February 1, 2022
    Publication date: May 19, 2022
    Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu
  • Patent number: 11244914
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a bond pad layer onto a dielectric structure formed over a substrate. The dielectric structure surrounds a plurality of interconnect layers. A protective layer is formed onto the bond pad layer, and the bond pad layer and the protective layer are patterned to define a bond pad covered by the protective layer. One or more upper passivation layers are formed over the protective layer. A dry etching process is performed to form an opening extending through the one or more upper passivation layers to the protective layer. A wet etching process is performed to remove a part of the protective layer and expose an upper surface of the bond pad.
    Type: Grant
    Filed: May 5, 2020
    Date of Patent: February 8, 2022
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu
  • Publication number: 20210351142
    Abstract: The present disclosure, in some embodiments, relates to a method of forming an integrated chip. The method may be performed by forming a bond pad layer onto a dielectric structure formed over a substrate. The dielectric structure surrounds a plurality of interconnect layers. A protective layer is formed onto the bond pad layer, and the bond pad layer and the protective layer are patterned to define a bond pad covered by the protective layer. One or more upper passivation layers are formed over the protective layer. A dry etching process is performed to form an opening extending through the one or more upper passivation layers to the protective layer. A wet etching process is performed to remove a part of the protective layer and expose an upper surface of the bond pad.
    Type: Application
    Filed: May 5, 2020
    Publication date: November 11, 2021
    Inventors: Tzu-Hsuan Yeh, Chern-Yow Hsu