Patents by Inventor Ulrich QUARTI

Ulrich QUARTI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF AN EUV POD
    Publication number: 20240006210
    Abstract: Method for inspection of an inner pod EIP and/or an outer pod EOP of an EUV pod, respectively including a base member and a cover member. The method includes acquiring inspection data sets using a line scan camera and an area scan camera, inspecting the cover member in a first inspection unit using the line scan camera, inspecting the base member in a second inspection unit using the area scan camera, inspecting the cover member in the second inspection unit using the area scan camera, and inspecting the base member in the first inspection unit using the line scan camera.
    Type: Application
    Filed: November 17, 2021
    Publication date: January 4, 2024
    Inventors: Lutz REBSTOCK, Ulrich QUARTI, Tobias FORSTNER