Patents by Inventor Ulrich Sowada

Ulrich Sowada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for monitoring the working of a workpiece with pulsed laser radiation
    Patent number: 5173584
    Abstract: For monitoring the working of a workpiece (W) with pulsed radiation of an excimer laser the workpiece surface is periodically illuminated with visible light (B) synchronously with at least some of the laser pulses. A mirror arrangement (S) separates visible light from ultraviolet laser light so that an image corresponding to the working operation can be picked up with a video camera (VK).
    Type: Grant
    Filed: April 19, 1991
    Date of Patent: December 22, 1992
    Assignee: Lambda Physik Forschungsgellschaft
    Inventors: Hans-Jurgen Kahlert, Ulrich Sowada