Patents by Inventor Umberto Maria Meotto

Umberto Maria Meotto has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11961801
    Abstract: Integrated circuitry comprises two three-dimensional (3D) array regions individually comprising tiers of electronic components. A stair-step region is between the two 3D-array regions. First stair-step structures alternate with second stair-step structures along a first direction within the stair-step region. The first stair-step structures individually comprise two opposing first flights of stairs in a first vertical cross-section along the first direction. The stairs in the first flights each have multiple different-depth treads in a second vertical cross-section that is along a second direction that is orthogonal to the first direction. The second stair-step structures individually comprise two opposing second flights of stairs in the first vertical cross-section. The stairs in the second flights each have only a single one tread along the second direction. Other embodiments, including method, are disclosed.
    Type: Grant
    Filed: July 12, 2021
    Date of Patent: April 16, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Lifang Xu, Indra V. Chary, David H. Wells, Harsh Narendrakumar Jain, Umberto Maria Meotto, Paolo Tessariol
  • Publication number: 20240099007
    Abstract: A microelectronic device comprises a stack structure comprising a stack structure comprising a vertically alternating sequence of conductive structures and insulative structures arranged in tiers, the stack structure divided into block structures separated from one another by slot structures, strings of memory cells vertically extending through the block structures of the stack structure, the strings of memory cells individually comprising a channel material vertically extending through the stack structure, an additional stack structure vertically overlying the stack structure and comprising a vertical sequence of additional conductive structures and additional insulative structures arranged in additional tiers, first pillars extending through the additional stack structure and vertically overlying the strings of memory cells, each of the first pillars horizontally offset from a center of a corresponding string of memory cells, second pillars extending through the additional stack structure and vertically ove
    Type: Application
    Filed: November 30, 2023
    Publication date: March 21, 2024
    Inventors: Yoshiaki Fukuzumi, Jun Fujiki, Matthew J. King, Sidhartha Gupta, Paolo Tessariol, Kunal Shrotri, Kye Hyun Baek, Kyle A. Ritter, Shuji Tanaka, Umberto Maria Meotto, Richard J. Hill, Matthew Holland
  • Publication number: 20240079057
    Abstract: A microelectronic device comprises a stack structure overlying a source tier. The stack structure comprises a vertically alternating sequence of conductive structures and insulative structures arranged in tiers. The microelectronic device comprises a staircase structure within the stack structure and having steps comprising lateral edges of the tiers, conductive contacts within a horizontal area of the staircase structure and vertically extending through the stack structure to the source tier, and strapping structures laterally adjacent to the conductive contacts and having upper surfaces substantially coplanar with upper surfaces of the conductive contacts. Each of the strapping structures are in contact with one of the conductive contacts and with one of the conductive structures of the stack structure at one of the steps of the staircase structure. Related memory devices, electronic systems, and methods of forming the microelectronic devices are also described.
    Type: Application
    Filed: September 7, 2022
    Publication date: March 7, 2024
    Inventors: Anna Maria Conti, Paolo Tessariol, Umberto Maria Meotto
  • Publication number: 20240071497
    Abstract: A variety of applications can include apparatus having memory devices, where at least one of the memory devices is a three-dimensional memory device having levels of pillars to support pillars of memory cells and one or more drain-end select gate (SGD) transistors of the memory array of the memory device. The levels of pillars are structured as a progression of pillars, where each pillar of one level is structured on and extending vertically from a different pillar of a level on which the one level is located. SGD select lines for coupling to the one or more SGD transistors are structured in a SGD stadium, where the SGD stadium is located within at least a portion of the progression of pillars.
    Type: Application
    Filed: August 30, 2022
    Publication date: February 29, 2024
    Inventors: Anna Maria Conti, Umberto Maria Meotto, Domenico Tuzi
  • Publication number: 20240071918
    Abstract: A microelectronic device includes a stack structure having tiers each including conductive material vertically neighboring insulative material and conductive contact structures. The stack structure is divided into blocks horizontally extending in parallel in a first direction and separated from one another in a second direction orthogonal to the first direction by insulative slot structures. At least one of the blocks includes a lower stadium structure having steps including edges of some of the tiers, and an upper stadium structure vertically overlying the lower stadium structure and having additional steps including edges of some other of the tiers vertically overlying the some of the tiers. The additional steps have greater tread widths in the first direction than the steps. Conductive contact structures are in contact with the additional steps of the upper stadium structure of the at least one of the blocks. Memory devices and electronic systems are also described.
    Type: Application
    Filed: August 25, 2022
    Publication date: February 29, 2024
    Inventors: Lifang Xu, Sidhartha Gupta, Indra V. Chary, Richard J. Hill, Umberto Maria Meotto
  • Publication number: 20240071501
    Abstract: Microelectronic devices include a stack having a vertically alternating sequence of insulative and conductive structures arranged in tiers. Slit structures extend through the stack, dividing the stack into blocks. A first series of stadiums—within the stack of a first block of a pair of the blocks—includes at least one stadium having multiple parallel sets of staircases. A second series of stadiums—within the stack of a second block of the pair of blocks—includes at least one additional stadium having additional multiple parallel sets of staircases that are mirrored, across one of the slit structures, to the multiple parallel sets of staircases of the first series. In methods of fabrication, common mask openings are used to form the mirrored staircase profiles once stadiums are already at substantially their final depths in the stack structure. Electronic systems are also disclosed.
    Type: Application
    Filed: August 2, 2023
    Publication date: February 29, 2024
    Inventors: Lifang Xu, Umberto Maria Meotto, Aaron S. Yip
  • Publication number: 20240064990
    Abstract: A method of forming a microelectronic device comprises forming a memory array region comprising memory cells vertically over a base structure comprising a semiconductive material and alignment mark structures vertically extending into the semiconductive material. First contact structures are formed to extend through the memory array region and into the alignment mark structures. A support structure is formed over the memory array region. A portion of the base structure is removed to expose the alignment mark structures. A control logic region is formed vertically adjacent a remaining portion of the base structure. The control logic region comprises control logic devices in electrical communication with the first contact structures by way of second contact structures extending partially through the alignment mark structures and contacting the first contact structures. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
    Type: Application
    Filed: November 1, 2023
    Publication date: February 22, 2024
    Inventors: Umberto Maria Meotto, Emilio Camerienghi, Paolo Tessariol, Luca Laurin
  • Publication number: 20240057328
    Abstract: A microelectronic device includes a stack structure including tiers each including insulative material and conductive material vertically adjacent the insulative material. The stack structure divided into at least two blocks separated from one another. The microelectronic device further includes at least one slot structure horizontally interposed between the at least two blocks of the stack structure. The at least one slot structure including additional insulative material and at least one contact structure extending through the additional insulative material to source tier underlying the stack structure.
    Type: Application
    Filed: August 12, 2022
    Publication date: February 15, 2024
    Inventors: Umberto Maria Meotto, Anna Maria Conti, Paolo Tessariol
  • Patent number: 11903196
    Abstract: A microelectronic device comprises a stack structure comprising a stack structure comprising a vertically alternating sequence of conductive structures and insulative structures arranged in tiers, the stack structure divided into block structures separated from one another by slot structures, strings of memory cells vertically extending through the block structures of the stack structure, the strings of memory cells individually comprising a channel material vertically extending through the stack structure, an additional stack structure vertically overlying the stack structure and comprising a vertical sequence of additional conductive structures and additional insulative structures arranged in additional tiers, first pillars extending through the additional stack structure and vertically overlying the strings of memory cells, each of the first pillars horizontally offset from a center of a corresponding string of memory cells, second pillars extending through the additional stack structure and vertically ove
    Type: Grant
    Filed: December 18, 2020
    Date of Patent: February 13, 2024
    Assignee: Micron Technology, Inc.
    Inventors: Yoshiaki Fukuzumi, Jun Fujiki, Matthew J. King, Sidhartha Gupta, Paolo Tessariol, Kunal Shrotri, Kye Hyun Baek, Kyle A. Ritter, Shuji Tanaka, Umberto Maria Meotto, Richard J. Hill, Matthew Holland
  • Patent number: 11818893
    Abstract: A method of forming a microelectronic device comprises forming a memory array region comprising memory cells vertically over a base structure comprising a semiconductive material and alignment mark structures vertically extending into the semiconductive material. First contact structures are formed to extend through the memory array region and into the alignment mark structures. A support structure is formed over the memory array region. A portion of the base structure is removed to expose the alignment mark structures. A control logic region is formed vertically adjacent a remaining portion of the base structure. The control logic region comprises control logic devices in electrical communication with the first contact structures by way of second contact structures extending partially through the alignment mark structures and contacting the first contact structures. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
    Type: Grant
    Filed: August 11, 2022
    Date of Patent: November 14, 2023
    Inventors: Umberto Maria Meotto, Emilio Camerlenghi, Paolo Tessariol, Luca Laurin
  • Publication number: 20230345730
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes levels of conductive materials interleaved with levels of dielectric materials; memory cell strings including respective pillars extending through the levels of conductive materials and the levels of dielectric materials; a first dielectric structure formed in a first slit through the levels of conductive materials and the levels of dielectric materials; a second dielectric structure formed in a second slit through the levels of conductive materials and the levels of dielectric materials; the first dielectric structure and the second dielectric structure separating the levels of conductive materials, the levels of dielectric materials, and the pillars into separate portions, and the first and second dielectric structures including different widths.
    Type: Application
    Filed: June 13, 2023
    Publication date: October 26, 2023
    Inventors: Paolo Tessariol, David H. Wells, Umberto Maria Meotto
  • Publication number: 20230317604
    Abstract: Microelectronic devices include a stack structure having a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. A series of stadiums, within the stack structure, includes stadiums of differing numbers of staircase sets, such as a stadium having multiple parallel sets of staircases and an additional stadium having a single set of staircases. Each of the staircases comprises steps, at ends of the conductive structures, with a same multi-tier riser height. In methods of fabrication, a same initial stadium opening may be concurrently formed for each of the stadiums—regardless of whether the stadium is to include the single set or the multiple parallel sets of staircases—with the steps of the same multi-tier riser height. Electronic systems are also disclosed.
    Type: Application
    Filed: March 30, 2022
    Publication date: October 5, 2023
    Inventors: Lifang Xu, Harsh Narendrakumar Jain, Indra V. Chary, Umberto Maria Meotto, Paolo Tessariol
  • Patent number: 11700732
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes levels of conductive materials interleaved with levels of dielectric materials; memory cell strings including respective pillars extending through the levels of conductive materials and the levels of dielectric materials; a first dielectric structure formed in a first slit through the levels of conductive materials and the levels of dielectric materials; a second dielectric structure formed in a second slit through the levels of conductive materials and the levels of dielectric materials; the first dielectric structure and the second dielectric structure separating the levels of conductive materials, the levels of dielectric materials, and the pillars into separate portions, and the first and second dielectric structures including different widths.
    Type: Grant
    Filed: January 11, 2021
    Date of Patent: July 11, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Paolo Tessariol, David H. Wells, Umberto Maria Meotto
  • Publication number: 20230009880
    Abstract: Integrated circuitry comprises two three-dimensional (3D) array regions individually comprising tiers of electronic components. A stair-step region is between the two 3D-array regions. First stair-step structures alternate with second stair-step structures along a first direction within the stair-step region. The first stair-step structures individually comprise two opposing first flights of stairs in a first vertical cross-section along the first direction. The stairs in the first flights each have multiple different-depth treads in a second vertical cross-section that is along a second direction that is orthogonal to the first direction. The second stair-step structures individually comprise two opposing second flights of stairs in the first vertical cross-section. The stairs in the second flights each have only a single one tread along the second direction. Other embodiments, including method, are disclosed.
    Type: Application
    Filed: July 12, 2021
    Publication date: January 12, 2023
    Applicant: Micron Technology, Inc.
    Inventors: Lifang Xu, Indra V. Chary, David H. Wells, Harsh Narendrakumar Jain, Umberto Maria Meotto, Paolo Tessariol
  • Publication number: 20220392914
    Abstract: A method of forming a microelectronic device comprises forming a memory array region comprising memory cells vertically over a base structure comprising a semiconductive material and alignment mark structures vertically extending into the semiconductive material. First contact structures are formed to extend through the memory array region and into the alignment mark structures. A support structure is formed over the memory array region. A portion of the base structure is removed to expose the alignment mark structures. A control logic region is formed vertically adjacent a remaining portion of the base structure. The control logic region comprises control logic devices in electrical communication with the first contact structures by way of second contact structures extending partially through the alignment mark structures and contacting the first contact structures. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
    Type: Application
    Filed: August 11, 2022
    Publication date: December 8, 2022
    Inventors: Umberto Maria Meotto, Emilio Camerlenghi, Paolo Tessariol, Luca Laurin
  • Patent number: 11417676
    Abstract: A method of forming a microelectronic device comprises forming a memory array region comprising memory cells vertically over a base structure comprising a semiconductive material and alignment mark structures vertically extending into the semiconductive material. First contact structures are formed to extend through the memory array region and into the alignment mark structures. A support structure is formed over the memory array region. A portion of the base structure is removed to expose the alignment mark structures. A control logic region is formed vertically adjacent a remaining portion of the base structure. The control logic region comprises control logic devices in electrical communication with the first contact structures by way of second contact structures extending partially through the alignment mark structures and contacting the first contact structures. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
    Type: Grant
    Filed: August 24, 2020
    Date of Patent: August 16, 2022
    Assignee: Micron Technology, Inc.
    Inventors: Umberto Maria Meotto, Emilio Camerlenghi, Paolo Tessariol, Luca Laurin
  • Publication number: 20220223613
    Abstract: Some embodiments include apparatuses and methods of forming the apparatuses. One of the apparatuses includes levels of conductive materials interleaved with levels of dielectric materials; memory cell strings including respective pillars extending through the levels of conductive materials and the levels of dielectric materials; a first dielectric structure formed in a first slit through the levels of conductive materials and the levels of dielectric materials; a second dielectric structure formed in a second slit through the levels of conductive materials and the levels of dielectric materials; the first dielectric structure and the second dielectric structure separating the levels of conductive materials, the levels of dielectric materials, and the pillars into separate portions, and the first and second dielectric structures including different widths.
    Type: Application
    Filed: January 11, 2021
    Publication date: July 14, 2022
    Inventors: Paolo Tessariol, David H. Wells, Umberto Maria Meotto
  • Publication number: 20220199641
    Abstract: A microelectronic device comprises a stack structure comprising a stack structure comprising a vertically alternating sequence of conductive structures and insulative structures arranged in tiers, the stack structure divided into block structures separated from one another by slot structures, strings of memory cells vertically extending through the block structures of the stack structure, the strings of memory cells individually comprising a channel material vertically extending through the stack structure, an additional stack structure vertically overlying the stack structure and comprising a vertical sequence of additional conductive structures and additional insulative structures arranged in additional tiers, first pillars extending through the additional stack structure and vertically overlying the strings of memory cells, each of the first pillars horizontally offset from a center of a corresponding string of memory cells, second pillars extending through the additional stack structure and vertically ove
    Type: Application
    Filed: December 18, 2020
    Publication date: June 23, 2022
    Inventors: Yoshiaki Fukuzumi, Jun Fujiki, Matthew J. King, Sidhartha Gupta, Paolo Tessariol, Kunal Shrotri, Kye Hyun Baek, Kyle A. Ritter, Shuji Tanaka, Umberto Maria Meotto, Richard J. Hill, Matthew Holland
  • Publication number: 20220059559
    Abstract: A method of forming a microelectronic device comprises forming a memory array region comprising memory cells vertically over a base structure comprising a semiconductive material and alignment mark structures vertically extending into the semiconductive material. First contact structures are formed to extend through the memory array region and into the alignment mark structures. A support structure is formed over the memory array region. A portion of the base structure is removed to expose the alignment mark structures. A control logic region is formed vertically adjacent a remaining portion of the base structure. The control logic region comprises control logic devices in electrical communication with the first contact structures by way of second contact structures extending partially through the alignment mark structures and contacting the first contact structures. Microelectronic devices, memory devices, electronic systems, and additional methods are also described.
    Type: Application
    Filed: August 24, 2020
    Publication date: February 24, 2022
    Inventors: Umberto Maria Meotto, Emilio Camerlenghi, Paolo Tessariol, Luca Laurin
  • Patent number: 9735354
    Abstract: A resistive random access memory array may be formed on the same substrate with a fuse array. The random access memory and the fuse array may use the same active material. For example, both the fuse array and the memory array may use a chalcogenide material as the active switching material. The main array may use a pattern of perpendicular sets of trench isolations and the fuse array may only use one set of parallel trench isolations. As a result, the fuse array may have a conductive line extending continuously between adjacent trench isolations. In some embodiments, this continuous line may reduce the resistance of the conductive path through the fuses.
    Type: Grant
    Filed: May 12, 2016
    Date of Patent: August 15, 2017
    Assignee: Micron Technology, Inc.
    Inventors: Andrea Redaelli, Agostino Pirovano, Umberto Maria Meotto, Giorgio Servalli