Patents by Inventor UWE PAUL HALLER

UWE PAUL HALLER has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber
    Patent number: 8772682
    Abstract: Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.
    Type: Grant
    Filed: May 1, 2013
    Date of Patent: July 8, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Hari Kishore Ambal, Uwe Paul Haller, Jianhua Zhou
  • METHODS AND APPARATUS FOR CONTROLLING TEMPERATURE OF A MULTI-ZONE HEATER IN A PROCESS CHAMBER
    Publication number: 20130270252
    Abstract: Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.
    Type: Application
    Filed: May 1, 2013
    Publication date: October 17, 2013
    Inventors: HARI KISHORE AMBAL, UWE PAUL HALLER, JIANHUA ZHOU
  • Methods and apparatus for controlling temperature of a multi-zone heater in an process chamber
    Patent number: 8552346
    Abstract: Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.
    Type: Grant
    Filed: May 20, 2011
    Date of Patent: October 8, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Hari Kishore Ambal, Uwe Paul Haller, Jianhua Zhou
  • METHODS AND APPARATUS FOR CONTROLLING TEMPERATURE OF A MULTI-ZONE HEATER IN A PROCESS CHAMBER
    Publication number: 20120292305
    Abstract: Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.
    Type: Application
    Filed: May 20, 2011
    Publication date: November 22, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: HARI KISHORE AMBAL, UWE PAUL HALLER, JIANHUA ZHOU