Patents by Inventor Uwe Schmalzbauer

Uwe Schmalzbauer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11810958
    Abstract: A transistor includes: gate electrodes and field electrodes, wherein in each case one gate electrode and one field electrode are arranged one above another in a vertical direction in a common trench of a semiconductor body; a gate pad to which the gate electrodes are connected; and a source metallization arranged above the semiconductor body. The field electrodes of a first group include at least one contact section. The at least one contact section is arranged between two sections of a gate electrode arranged in the same trench and is connected to the source metallization. The two sections of the gate electrode are separated from one another in a region of the contact section. At least one of the two sections of the gate electrode arranged in the same trench is electrically connected to a gate electrode arranged in a further trench by way of a gate connecting electrode.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: November 7, 2023
    Assignee: Infineon Technologies AG
    Inventors: Felix Buth, Margarete Deckers, Christian Feuerbaum, Uwe Schmalzbauer, Markus Zundel
  • Patent number: 11804432
    Abstract: A semiconductor device includes a semiconductor substrate having a first main surface and a metal structure above the first main surface. The metal structure has a periphery region that includes a transition section along which the metal structure transitions from a first thickness to a second thickness less than the first thickness. A polymer-based insulating material contacts and covers at least the periphery region of the metal structure. A thickness of the polymer-based insulating material begins to increase on a first main surface of the metal structure that faces away from the semiconductor substrate and continues to increase in a direction towards the transition section. An average slope of a surface of the polymer-based insulating material which faces away from the semiconductor substrate, as measured with respect to the first main surface of the metal structure, is less than 60 degrees along the periphery region of the metal structure.
    Type: Grant
    Filed: February 11, 2021
    Date of Patent: October 31, 2023
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Sergey Ananiev, Andreas Behrendt, Holger Doepke, Uwe Schmalzbauer, Michael Sorger, Dominic Thurmer
  • Publication number: 20220254713
    Abstract: A semiconductor device includes a semiconductor substrate having a first main surface and a metal structure above the first main surface. The metal structure has a periphery region that includes a transition section along which the metal structure transitions from a first thickness to a second thickness less than the first thickness. A polymer-based insulating material contacts and covers at least the periphery region of the metal structure. A thickness of the polymer-based insulating material begins to increase on a first main surface of the metal structure that faces away from the semiconductor substrate and continues to increase in a direction towards the transition section. An average slope of a surface of the polymer-based insulating material which faces away from the semiconductor substrate, as measured with respect to the first main surface of the metal structure, is less than 60 degrees along the periphery region of the metal structure.
    Type: Application
    Filed: February 11, 2021
    Publication date: August 11, 2022
    Inventors: Markus Zundel, Sergey Ananiev, Andreas Behrendt, Holger Doepke, Uwe Schmalzbauer, Michael Sorger, Dominic Thurmer
  • Publication number: 20220052171
    Abstract: A transistor includes: gate electrodes and field electrodes, wherein in each case one gate electrode and one field electrode are arranged one above another in a vertical direction in a common trench of a semiconductor body; a gate pad to which the gate electrodes are connected; and a source metallization arranged above the semiconductor body. The field electrodes of a first group include at least one contact section. The at least one contact section is arranged between two sections of a gate electrode arranged in the same trench and is connected to the source metallization. The two sections of the gate electrode are separated from one another in a region of the contact section. At least one of the two sections of the gate electrode arranged in the same trench is electrically connected to a gate electrode arranged in a further trench by way of a gate connecting electrode.
    Type: Application
    Filed: August 12, 2021
    Publication date: February 17, 2022
    Inventors: Felix Buth, Margarete Deckers, Christian Feuerbaum, Uwe Schmalzbauer, Markus Zundel
  • Patent number: 9570433
    Abstract: A semiconductor device includes a semiconductor substrate including a main surface with a polygonal geometry and a main electric circuit manufactured within a main region on the semiconductor substrate. The main electric circuit is operable to perform an electric main function. The main region extends over the main surface of the semiconductor substrate leaving open at least one corner area at a corner of the polygonal geometry of the main surface of the semiconductor substrate. The corner area extends at least 300 ?m along the edges of the semiconductor substrate beginning at the corner.
    Type: Grant
    Filed: September 21, 2015
    Date of Patent: February 14, 2017
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Vanessa Capodieci, Markus Dinkel, Uwe Schmalzbauer
  • Publication number: 20160254200
    Abstract: A semiconductor component includes a semiconductor body having a bottom side, a top side spaced distant from the bottom side in a vertical direction, and a thickness in the vertical direction, and a crack sensor configured to detect a crack in the semiconductor body. The crack sensor extends into the semiconductor body. A distance between the crack sensor and the bottom side is less than the thickness of the semiconductor body. A crack in the semiconductor body is detected by specifying a first value of a characteristic variable of the crack sensor, determining a second value of the characteristic variable of the crack sensor at a different time than the first value is specified, and determining the semiconductor body has a crack if the second value differs from the first value by more than a pre-defined difference.
    Type: Application
    Filed: May 9, 2016
    Publication date: September 1, 2016
    Inventors: Markus Zundel, Uwe Schmalzbauer, Rudolf Zelsacher
  • Patent number: 9343381
    Abstract: A first embodiment relates to a semiconductor component. The semiconductor component has a semiconductor body with a bottom side and a top side spaced distant from the bottom side in a vertical direction. In the vertical direction, the semiconductor body has a certain thickness. The semiconductor component further has a crack sensor configured to detect a crack in the semiconductor body. The crack sensor extends into the semiconductor body. A distance between the crack sensor and the bottom side is less than the thickness of the semiconductor body.
    Type: Grant
    Filed: May 22, 2013
    Date of Patent: May 17, 2016
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Uwe Schmalzbauer, Rudolf Zelsacher
  • Publication number: 20160013176
    Abstract: A semiconductor device includes a semiconductor substrate including a main surface with a polygonal geometry and a main electric circuit manufactured within a main region on the semiconductor substrate. The main electric circuit is operable to perform an electric main function. The main region extends over the main surface of the semiconductor substrate leaving open at least one corner area at a corner of the polygonal geometry of the main surface of the semiconductor substrate. The corner area extends at least 300 ?m along the edges of the semiconductor substrate beginning at the corner.
    Type: Application
    Filed: September 21, 2015
    Publication date: January 14, 2016
    Inventors: Markus Zundel, Vanessa Capodieci, Markus Dinkel, Uwe Schmalzbauer
  • Patent number: 9218960
    Abstract: A method of manufacturing a semiconductor device includes providing a layered structure having a hard dielectric layer containing a first dielectric material having a Young's modulus greater than 10 GPa in a central portion of a main surface of a main body comprising a single crystalline semiconductor body, and providing a dielectric stress relief layer containing a second dielectric material having a lower Young's modulus than the first dielectric material, the stress relief layer covering the layered structure and extending beyond an outer edge of the layered structure.
    Type: Grant
    Filed: June 30, 2014
    Date of Patent: December 22, 2015
    Assignee: Infineon Technologies AG
    Inventors: Peter Nelle, Uwe Schmalzbauer, Juergen Holzmueller, Markus Zundel
  • Patent number: 9171777
    Abstract: A semiconductor device includes a semiconductor substrate including a main surface with a polygonal geometry and a main electric circuit manufactured within a main region on the semiconductor substrate. The main electric circuit is operable to perform an electric main function. The main region extends over the main surface of the semiconductor substrate leaving open at least one corner area at a corner of the polygonal geometry of the main surface of the semiconductor substrate. The corner area extends at least 300 ?m along the edges of the semiconductor substrate beginning at the corner.
    Type: Grant
    Filed: January 29, 2013
    Date of Patent: October 27, 2015
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Vanessa Capodieci, Markus Dinkel, Uwe Schmalzbauer
  • Patent number: 8933448
    Abstract: Wafers with chips thereon and corresponding chips are provided where test structures or parts thereof are provided in a peripheral chip area of the chip. Corresponding methods are also disclosed.
    Type: Grant
    Filed: July 27, 2012
    Date of Patent: January 13, 2015
    Assignee: Infineon Technologies AG
    Inventors: Markus Zundel, Uwe Schmalzbauer
  • Publication number: 20140346509
    Abstract: A first embodiment relates to a semiconductor component. The semiconductor component has a semiconductor body with a bottom side and a top side spaced distant from the bottom side in a vertical direction. In the vertical direction, the semiconductor body has a certain thickness. The semiconductor component further has a crack sensor configured to detect a crack in the semiconductor body. The crack sensor extends into the semiconductor body. A distance between the crack sensor and the bottom side is less than the thickness of the semiconductor body.
    Type: Application
    Filed: May 22, 2013
    Publication date: November 27, 2014
    Inventors: Markus Zundel, Uwe Schmalzbauer, Rudolf Zelsacher
  • Publication number: 20140315391
    Abstract: A method of manufacturing a semiconductor device includes providing a layered structure having a hard dielectric layer containing a first dielectric material having a Young's modulus greater than 10 GPa in a central portion of a main surface of a main body comprising a single crystalline semiconductor body, and providing a dielectric stress relief layer containing a second dielectric material having a lower Young's modulus than the first dielectric material, the stress relief layer covering the layered structure and extending beyond an outer edge of the layered structure.
    Type: Application
    Filed: June 30, 2014
    Publication date: October 23, 2014
    Inventors: Peter Nelle, Uwe Schmalzbauer, Juergen Holzmueller, Markus Zundel
  • Patent number: 8803297
    Abstract: A semiconductor device includes a main body having a single crystalline semiconductor body. A layered structure directly adjoins a central portion of a main surface of the main body and includes a hard dielectric layer provided from a first dielectric material with Young's modulus greater than 10 GPa. A stress relief layer directly adjoins the layered structure opposite to the main body and extends beyond an outer edge of the layered structure. Providing the layered structure at a distance to the edge of the main body and covering the outer surface of the layered structures with the stress relief layer enhances device reliability.
    Type: Grant
    Filed: August 10, 2012
    Date of Patent: August 12, 2014
    Assignee: Infineon Technologies AG
    Inventors: Peter Nelle, Uwe Schmalzbauer, Juergen Holzmueller, Markus Zundel
  • Publication number: 20140167044
    Abstract: A semiconductor device includes a semiconductor substrate including a main surface with a polygonal geometry and a main electric circuit manufactured within a main region on the semiconductor substrate. The main electric circuit is operable to perform an electric main function. The main region extends over the main surface of the semiconductor substrate leaving open at least one corner area at a corner of the polygonal geometry of the main surface of the semiconductor substrate. The corner area extends at least 300 ?m along the edges of the semiconductor substrate beginning at the corner.
    Type: Application
    Filed: January 29, 2013
    Publication date: June 19, 2014
    Applicant: Infineon Technologies AG
    Inventors: Markus Zundel, Vanessa Capodieci, Markus Dinkel, Uwe Schmalzbauer
  • Publication number: 20140167043
    Abstract: A semiconductor device includes a semiconductor substrate including a main surface with a polygonal geometry and a main electric circuit manufactured within a main region on the semiconductor substrate. The main electric circuit is operable to perform an electric main function. The main region extends over the main surface of the semiconductor substrate leaving open at least one corner area at a corner of the polygonal geometry of the main surface of the semiconductor substrate. The corner area extends at least 300 ?m along the edges of the semiconductor substrate beginning at the corner.
    Type: Application
    Filed: December 19, 2012
    Publication date: June 19, 2014
    Applicant: Infineon Technologies AG
    Inventors: Markus Zundel, Vanessa Capodieci, Markus Dinkel, Uwe Schmalzbauer
  • Publication number: 20140042597
    Abstract: A semiconductor device includes a main body having a single crystalline semiconductor body. A layered structure directly adjoins a central portion of a main surface of the main body and includes a hard dielectric layer provided from a first dielectric material with Young's modulus greater than 10 GPa. A stress relief layer directly adjoins the layered structure opposite to the main body and extends beyond an outer edge of the layered structure. Providing the layered structure at a distance to the edge of the main body and covering the outer surface of the layered structures with the stress relief layer enhances device reliability.
    Type: Application
    Filed: August 10, 2012
    Publication date: February 13, 2014
    Applicant: INFINEON TECHNOLOGIES AG
    Inventors: Peter Nelle, Uwe Schmalzbauer, Juergen Holzmueller, Markus Zundel
  • Publication number: 20140027772
    Abstract: Wafers with chips thereon and corresponding chips are provided where test structures or parts thereof are provided in a peripheral chip area of the chip. Corresponding methods are also disclosed.
    Type: Application
    Filed: July 27, 2012
    Publication date: January 30, 2014
    Applicant: Infineon Technologies AG
    Inventors: Markus ZUNDEL, Uwe SCHMALZBAUER
  • Patent number: 8084865
    Abstract: An anchoring structure for a metal structure of a semiconductor device includes an anchoring recess structure having at least one overhanging side wall, the metal structure being at least partly arranged within the anchoring recess structure.
    Type: Grant
    Filed: April 30, 2008
    Date of Patent: December 27, 2011
    Assignee: Infineon Technologies AG
    Inventors: Franz Hirler, Walter Rieger, Uwe Schmalzbauer, Rudolf Zelsacher, Markus Zundel
  • Patent number: 7939885
    Abstract: A semiconductor device has a substrate having a plurality of neighboring trenches, and a contact area, one mesa stripe each being formed between two neighboring trenches. The contact area contacts mesa stripes and surrounds an opening region in which the contact area is not formed and which is formed such that the contact area contacts the same mesa stripes at two positions between which the opening region is arranged, and the opening region having a region of elongate extension which intersects the mesa stripes in a skewed or perpendicular manner.
    Type: Grant
    Filed: April 30, 2008
    Date of Patent: May 10, 2011
    Assignee: Infineon Technologies Austria AG
    Inventors: Mathias Hans-Ulrich Alexander Von Borcke, Markus Zundel, Uwe Schmalzbauer