Abstract: An aspect of the present invention includes a method and device for translating a structured message into a context tagged, XML message. A two step translation is described, first including translation from structured message to structure tagged message, and then from structure tagged message to context tagged message. Standard tools may be used in the second step to apply validations or business logic. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: An aspect of the present invention includes a method and device for listening to communications between processes and tools, recording report and report trigger definitions, matching reports from tools with the recorded definitions, and translating messages into a context-insensitive format. Other aspects of the present invention include dynamically enhancing tool status reports, migrating processes form tool control hosts to distributed processors, and screening requests for tool status information from hosts and distributed processors. More detailed descriptions of aspects of the present invention are described in the claims, specification and drawings.

Abstract: The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: An aspect of the present invention includes a method and device for listening to communications between processes and tools, recording report and report trigger definitions, matching reports from tools with the recorded definitions, and translating messages into a context-insensitive format. Other aspects of the present invention include dynamically enhancing tool status reports, migrating processes form tool control hosts to distributed processors, and screening requests for tool status information from hosts and distributed processors. More detailed descriptions of aspects of the present invention are described in the claims, specification and drawings.

Abstract: An aspect of the present invention includes a method and device for listening to communications between processes and tools, recording report and report trigger definitions, matching reports from tools with the recorded definitions, and translating messages into a context-insensitive format. Other aspects of the present invention include dynamically enhancing tool status reports, migrating processes form tool control hosts to distributed processors, and screening requests for tool status information from hosts and distributed processors. More detailed descriptions of aspects of the present invention are described in the claims, specification and drawings.

Abstract: An aspect of the present invention includes a method and device for translating a structured message into a context tagged, XML message. A two step translation is described, first including translation from structured message to structure tagged message, and then from structure tagged message to context tagged message. Standard tools may be used in the second step to apply validations or business logic. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: A method and apparatus for process monitoring are provided. Process monitoring includes (i) generating a multivariate analysis reference model of a process environment from data corresponding to monitored parameters of the process environment; (ii) designating at least one of the monitored parameters as being correlated to maturation of the process environment; (iii) collecting current process data corresponding to the monitored parameters, including the at least one designated parameter; and (iv) scaling the multivariate reference model based on the current process data of the at least one designated parameter to account for maturation of the process environment. The method further includes generating one or more current multivariate analysis process metrics that represent a current state of the process environment from the current process data; and comparing the current process metrics to the scaled reference model to determine whether the current state of the process environment is acceptable.

Abstract: The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: An aspect of the present invention includes a method and device for translating a structured message into a context tagged, XML message. A two step translation is described, first including translation from structured message to structure tagged message, and then from structure tagged message to context tagged message. Standard tools may be used in the second step to apply validations or business logic. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: A graphical user interface for enabling a user to graphically observe on a displaying mechanism a statistical measure of the process quality of a manufacturing process provides for the display of an icon representing a workpiece. The location and color of the icon on the displaying mechanism indicates the process quality of the manufacturing process for the represented workpiece.

Abstract: The present invention relates to control of and data collection from sensors associated with tools. In particular, it relates to using a controller to mediate communications among a tool, sensors associated with the tool and data users, such as a host system or distributed processors. Particular aspects of the present invention are described in the claims, specification and drawings.

Abstract: A graphical user interface for enabling a user to graphically observe on a displaying mechanism a statistical measure of the process quality of a manufacturing process provides for the display of an icon representing a workpiece. The location and color of the icon on the displaying mechanism indicates the process quality of the manufacturing process for the represented workpiece.

Abstract: A method and apparatus for automated bidirectional integration of peripheral data sources for a production tool couples the system components together in a web-based arrangement. The process tools and the peripheral data sources are configured as websites to provide information to the system. Certain components of the system are also configured as browsers to obtain available information and use this information to make decisions and perform actions.