Abstract: An accelerometer device comprises a silicon semiconductor member having a mass mounted on a support by integral beams extending between the mass and support to permit movement of the mass in response to acceleration. Piezoresistive sensors are accommodated in the beams for sensing strain in the beams during movement of the mass to provide an output signal from the device corresponding to the acceleration. The beams each have an end secured to the support and an end secured to the mass and taper intermediate the beam ends to provide a high and substantially uniform strain throughout the tapered section of the beam. The piezoresistive sensor is accommodated in the tapered beam section to be responsive to that high, uniform strain.

Abstract: A sensor (10) responding to the action a force comprises a base body (12) and a force takeup element (14) which is connected to the base body (12) via at least one support element (16, 18, 20, 22). The support element deforms under the influence of a force acting on the takeup element (14). In the deformation region between each support element (16, 18, 20, 22) and the force takeup element (14) a measuring member (32, 34, 36, 38) is disposed which reacts to the deformation with a change in a physical parameter. An uninterrupted conductor path (44) is provided which extends from a first terminal land (46) on the base body (12) via each support element (16, 18, 20, 22) and the force takeup element (14) to a second terminal land (48) on the base body (12).