Patents by Inventor Vahid Fioruzdor

Vahid Fioruzdor has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Innovative top-coat approach for advanced device on-wafer particle performance
    Patent number: 9604249
    Abstract: To manufacture a coating for an article for a semiconductor processing chamber, the coating is applied to the article by a method including applying a sol-gel coating of Y2O3 over the article, and curing the sol-gel coating on the article by heating the article with the sol-gel coating and exposing the article with the sol-gel coating to plasma in a semiconductor manufacturing chamber.
    Type: Grant
    Filed: February 5, 2013
    Date of Patent: March 28, 2017
    Assignee: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Dmitry Lubomirsky, Vahid Fioruzdor
  • INNOVATIVE TOP-COAT APPROACH FOR ADVANCED DEVICE ON-WAFER PARTICLE PERFORMANCE
    Publication number: 20140030533
    Abstract: To manufacture a coating for an article for a semiconductor processing chamber, the coating is applied to the article by a method including applying a sol-gel coating of Y2O3 over the article, and curing the sol-gel coating on the article by heating the article with the sol-gel coating and exposing the article with the sol-gel coating to plasma in a semiconductor manufacturing chamber.
    Type: Application
    Filed: February 5, 2013
    Publication date: January 30, 2014
    Applicant: Applied Materials, Inc.
    Inventors: Jennifer Y. Sun, Biraja P. Kanungo, Dmirty Lubomirsky, Vahid Fioruzdor