Abstract: A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter includes zirconium and SiN3. The radiation filter may form part of a radiation sensor including a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodiode arranged to receive radiation transmitted by the passivation layer, and circuit elements connected to the photodiode. The radiation sensor may perform optical measurements as part of an extreme ultraviolet lithographic apparatus or a lithographic tool.

Abstract: Disclosed herein are electrochemical cells comprising electrodes prepared from layered materials comprising a substantially two-dimensional ordered array of cells having an empirical formula of Mn+1Xn, where M comprises a transition metal selected from the group consisting of a Group IIIB metal, a Group IVB metal, a Group VB metal, a Group VIB metal, and any combination thereof, X is CxNy wherein x+y=n, and n is equal to 1, 2, or 3. Also disclosed herein are batteries comprising the electrochemical cells and methods for electrochemically preparing MXene compositions with the use of the electrochemical cells.

Abstract: A transmissive diffraction grating for a phase-stepping measurement system for determining an aberration map for a projection system comprises an absorbing layer. The diffraction grating is for use with radiation having a first wavelength (for example (EUV radiation). The absorbing layer is provided with a two-dimensional array of through-apertures. The absorbing layer is formed from a material which has a refractive index for the radiation having the first wavelength in the range 0.% to 1.04.

Abstract: The present technology provides a nanopore electrode sequencer for the characterization and sequencing of biomolecules. Two or more ultrathin MXene sheets containing nanopores serve as electrodes that bind and store cations which can be released to provide ionic current through the nanopore during sequencing, thereby eliminating access resistance to ions at the entrance to the nanopore from bulk solution. Resolution of ionic current changes caused by biopolymer components within the nanopore is thereby substantially improved, providing more sensitive and robust sequencing of biopolymers.

Abstract: A radiation filter for reducing transmission of an unwanted wavelength of radiation. The radiation filter includes zirconium and SiN3. The radiation filter may form part of a radiation sensor including a passivation layer arranged to receive radiation transmitted by the radiation filter, a photodiode arranged to receive radiation transmitted by the passivation layer, and circuit elements connected to the photodiode. The radiation sensor may perform optical measurements as part of an extreme ultraviolet lithographic apparatus or a lithographic tool.

Abstract: Disclosed herein are electrochemical cells comprising electrodes prepared from layered materials omprising a substantially two-dimensional ordered array of cells having an empirical formula of Mn+1Xn, where M comprises a transition metal selected from the group consisting of a Group IIIB metal, a Group IVB metal, a Group VB metal, a Group VIB metal, and any combination thereof, X is CxNy wherein x+y=n, and n is equal to 1, 2, or 3. Also disclosed herein are batteries comprising the electrochemical cells and methods for electrochemically preparing MXene compositions with the use of the electrochemical cells.

Abstract: Disclosed herein are electrochemical cells comprising electrodes prepared from layered materials comprising a substantially two-dimensional ordered array of cells having an empirical formula of Mn+1Xn, where M comprises a transition metal selected from the group consisting of a Group IIIB metal, a Group IVB metal, a Group VB metal, a Group VIB metal, and any combination thereof, X is CxNy wherein x+y=n, and n is equal to 1, 2, or 3. Also disclosed herein are batteries comprising the electrochemical cells and methods for electrochemically preparing MXene compositions with the use of the electrochemical cells.

Abstract: Disclosed herein are electrochemical cells comprising electrodes prepared from layered materials comprising a substantially two-dimensional ordered array of cells having an empirical formula of Mn+1Xn, where M comprises a transition metal selected from the group consisting of a Group IIIB metal, a Group IVB metal, a Group VB metal, a Group VIB metal, and any combination thereof, X is CxNy wherein x+y=n, and n is equal to 1, 2, or 3. Also disclosed herein are batteries comprising the electrochemical cells and methods for electrochemically preparing MXene compositions with the use of the electrochemical cells.