Patents by Inventor Vaishali Raghu Vohra

Vaishali Raghu Vohra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coating compositions for use with an overcoated photoresist
    Patent number: 7919222
    Abstract: Underlying coating compositions are provided for use with an overcoated photoresist composition. In one aspect, the coating composition can be crosslinked and comprise one or more components that contain one or more acid-labile groups and/or one or more base-reactive groups that are reactive following crosslinking. In another aspect, underlying coating composition are provided that can be treated to provide a modulated water contact angle. Preferred underlying coating compositions can exhibit enhanced etch rates in plasma etchants. Additional preferred coating compositions can enhance lithographic performance of an associated photoresist composition.
    Type: Grant
    Filed: January 26, 2007
    Date of Patent: April 5, 2011
    Assignee: Rohm and Haas Electronics Materials LLC
    Inventors: Vaishali Raghu Vohra, James W. Thackeray, Gerald B. Wayton
  • Coating compositions for use with an overcoated photoresist
    Publication number: 20070178406
    Abstract: Underlying coating compositions are provided for use with an overcoated photoresist composition. In one aspect, the coating composition can be crosslinked and comprise one or more components that contain one or more acid-labile groups and/or one or more base-reactive groups that are reactive following crosslinking. In another aspect, underlying coating composition are provided that can be treated to provide a modulated water contact angle. Preferred underlying coating compositions can exhibit enhanced etch rates in plasma etchants. Additional preferred coating compositions can enhance lithographic performance of an associated photoresist composition.
    Type: Application
    Filed: January 26, 2007
    Publication date: August 2, 2007
    Applicant: Rohm and Haas Electronic Materials LLC
    Inventors: Vaishali Raghu Vohra, James W. Thackeray, Gerald B. Wayton