Abstract: Systems and methods for detecting a material composition of a specimen and for cross-sectioning of the specimen. The system includes an imaging system, a femtosecond laser source, and optionally, a synchronized CO2 injection system. The imaging system is configured to capture image data of a surface of the specimen that has been etched by the laser. A machine learning model is applied to determine a predicted material composition of the specimen based at least in part on the image data. The machine learning model is trained to receive as input the image data and/or one or more quantified surface texture parameters determined from the image data and to produce as output an indication of a predicted material composition. A laser-based milling system is configured to use these material composition detection mechanisms to automatically determine when the laser system has milled through a first layer of a specimen and reached a second layer, and to adjust the operation of the milling system in response.

Abstract: System and methods are described for directly measuring mechanical properties of a sample while concurrently imaging the sample using a scanning beam microscope (e.g., a scanning electron microscope (SEM)). The system includes a clamping mount configured to hold the sample and a load cell positioned proximal to the clamping mount and configured to provide a direct, real-time measurement of force on the sample end. The system further includes a controllable probe configured to apply a force to the sample. In some embodiments, the sample load cell is tiltably couplable to a sample held by the clamping mount and the controllable probe is moveable between a plurality of different mounting positions relative to the load cell.

Abstract: System and methods are described for directly measuring mechanical properties of a sample while concurrently imaging the sample using a scanning beam microscope (e.g., a scanning electron microscope (SEM)).

Abstract: The present disclosure provides a gas injection system that can include a housing configured to hold a plurality of precursor cartridges comprising one or more precursor materials, and a nozzle extending from the housing, the nozzle having a tip configured for insertion into a sample chamber of a material processing apparatus. The precursor cartridges are fluidly connected to the nozzle to selectively deliver one or more precursor gasses to the sample chamber.

Abstract: The present disclosure provides a gas injection system that can include a housing configured to hold a plurality of precursor cartridges comprising one or more precursor materials, and a nozzle extending from the housing, the nozzle having a tip configured for insertion into a sample chamber of a material processing apparatus. The precursor cartridges are fluidly connected to the nozzle to selectively deliver one or more precursor gasses to the sample chamber.

Abstract: The present disclosure provides a gas injection system that can include a housing configured to hold a plurality of precursor cartridges comprising one or more precursor materials, and a nozzle extending from the housing, the nozzle having a tip configured for insertion into a sample chamber of a material processing apparatus. The precursor cartridges are fluidly connected to the nozzle to selectively deliver one or more precursor gasses to the sample chamber.

Abstract: System and methods are described for directly measuring mechanical properties of a sample while concurrently imaging the sample using a scanning beam microscope (e.g., a scanning electron microscope (SEM)). The system includes a clamping mount configured to hold the sample and a load cell positioned proximal to the clamping mount and configured to provide a direct, real-time measurement of force on the sample end. The system further includes a controllable probe configured to apply a force to the sample. In some embodiments, the sample load cell is tiltably couplable to a sample held by the clamping mount and the controllable probe is moveable between a plurality of different mounting positions relative to the load cell.

Abstract: The invention increases the sensitivity of end point detection in charged particle beam processing by using the blanking frequency of the charged particle beam as a reference frequency. The modulating frequency of the charged particle beam can be readily detected in a detected signal by using the reference frequency in a frequency sensitive circuit, such as a lock in amplifier. A change in the modulating frequency in the detected signal indicates that the beam is impinging on a change in the material in the work piece, so an operation to mill through an insulating layer to expose the conductor, or operation to mill through a conductor, is halted.

Abstract: Topographical data from a scanning probe microscope or similar device is used as a substitute for endpoint detection to allow accurate repair of defects in phase shift photomasks using a charged particle beam system. The topographical data from a defect area is used to create a display of a semitransparent topographical map, which can be superimposed over a charged particle beam image. The density of the topographical image and the alignment of the two images can be adjusted by the operator in order to accurately position the beam. Topographical data from an SPM can also be used to adjust charged particle beam dose for each point within the defect area based upon the elevation and surface angle at the particular point.