Patents by Inventor Vassil N. Antonov

Vassil N. Antonov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9236427
    Abstract: Some embodiments include a method of forming a capacitor. An opening is formed through a silicon-containing mass to a base, and sidewalls of the opening are lined with protective material. A first capacitor electrode is formed within the opening and has sidewalls along the protective material. At least some of the silicon-containing mass is removed with an etch. The protective material protects the first capacitor electrode from being removed by the etch. A second capacitor electrode is formed along the sidewalls of the first capacitor electrode, and is spaced from the first capacitor electrode by capacitor dielectric. Some embodiments include multi-material structures having one or more of aluminum nitride, molybdenum nitride, niobium nitride, niobium oxide, silicon dioxide, tantalum nitride and tantalum oxide. Some embodiments include semiconductor constructions.
    Type: Grant
    Filed: September 30, 2014
    Date of Patent: January 12, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Joseph Neil Greeley, Duane M. Goodner, Vishwanath Bhat, Vassil N. Antonov, Prashant Raghu
  • Patent number: 9209013
    Abstract: Some embodiments include methods of forming rutile-type titanium oxide. A monolayer of titanium nitride may be formed. The monolayer of titanium nitride may then be oxidized at a temperature less than or equal to about 550° C. to convert it into a monolayer of rutile-type titanium oxide. Some embodiments include methods of forming capacitors that have rutile-type titanium oxide dielectric, and that have at least one electrode comprising titanium nitride. Some embodiments include thermally conductive stacks that contain titanium nitride and rutile-type titanium oxide, and some embodiments include methods of forming such stacks.
    Type: Grant
    Filed: July 31, 2013
    Date of Patent: December 8, 2015
    Assignee: Micron Technology, Inc.
    Inventors: Nik Mirin, Tsai-Yu Huang, Vishwanath Bhat, Chris M. Carlson, Vassil N. Antonov
  • Publication number: 20150194478
    Abstract: A method of forming a capacitor includes forming an elevationally elongated and elevationally inner capacitor electrode that comprises different composition laterally-outermost and laterally-innermost conductive portions that have different respective intrinsic residual mechanical stress. The innermost conductive portion is formed to have greater mechanical stress in the compressive direction than the outermost conductive portion. A capacitor dielectric is formed over the inner capacitor electrode and an elevationally outer capacitor electrode is formed over the capacitor dielectric. A capacitor construction independent of the method formed is disclosed.
    Type: Application
    Filed: January 3, 2014
    Publication date: July 9, 2015
    Applicant: Micron Technology, Inc.
    Inventors: Vassil N. Antonov, Vishwanath Bhat
  • Publication number: 20150054127
    Abstract: Some embodiments include a method of forming a capacitor. An opening is formed through a silicon-containing mass to a base, and sidewalls of the opening are lined with protective material. A first capacitor electrode is formed within the opening and has sidewalls along the protective material. At least some of the silicon-containing mass is removed with an etch. The protective material protects the first capacitor electrode from being removed by the etch. A second capacitor electrode is formed along the sidewalls of the first capacitor electrode, and is spaced from the first capacitor electrode by capacitor dielectric. Some embodiments include multi-material structures having one or more of aluminum nitride, molybdenum nitride, niobium nitride, niobium oxide, silicon dioxide, tantalum nitride and tantalum oxide. Some embodiments include semiconductor constructions.
    Type: Application
    Filed: September 30, 2014
    Publication date: February 26, 2015
    Inventors: Joseph Neil Greeley, Duane M. Goodner, Vishwanath Bhat, Vassil N. Antonov, Prashant Raghu
  • Patent number: 8865544
    Abstract: Some embodiments include a method of forming a capacitor. An opening is formed through a silicon-containing mass to a base, and sidewalls of the opening are lined with protective material. A first capacitor electrode is formed within the opening and has sidewalls along the protective material. At least some of the silicon-containing mass is removed with an etch. The protective material protects the first capacitor electrode from being removed by the etch. A second capacitor electrode is formed along the sidewalls of the first capacitor electrode, and is spaced from the first capacitor electrode by capacitor dielectric. Some embodiments include multi-material structures having one or more of aluminum nitride, molybdenum nitride, niobium nitride, niobium oxide, silicon dioxide, tantalum nitride and tantalum oxide. Some embodiments include semiconductor constructions.
    Type: Grant
    Filed: July 11, 2012
    Date of Patent: October 21, 2014
    Assignee: Micron Technology, Inc.
    Inventors: Joseph Neil Greeley, Duane M. Goodner, Vishwanath Bhat, Vassil N. Antonov, Prashant Raghu
  • Publication number: 20140015097
    Abstract: Some embodiments include a method of forming a capacitor. An opening is formed through a silicon-containing mass to a base, and sidewalls of the opening are lined with protective material. A first capacitor electrode is formed within the opening and has sidewalls along the protective material. At least some of the silicon-containing mass is removed with an etch. The protective material protects the first capacitor electrode from being removed by the etch. A second capacitor electrode is formed along the sidewalls of the first capacitor electrode, and is spaced from the first capacitor electrode by capacitor dielectric. Some embodiments include multi-material structures having one or more of aluminum nitride, molybdenum nitride, niobium nitride, niobium oxide, silicon dioxide, tantalum nitride and tantalum oxide. Some embodiments include semiconductor constructions.
    Type: Application
    Filed: July 11, 2012
    Publication date: January 16, 2014
    Applicant: MICRON TECHNOLOGY, INC.
    Inventors: Joseph Neil Greeley, Duane M. Goodner, Vishwanath Bhat, Vassil N. Antonov, Prashant Raghu
  • Publication number: 20130316153
    Abstract: Some embodiments include methods of forming rutile-type titanium oxide. A monolayer of titanium nitride may be formed. The monolayer of titanium nitride may then be oxidized at a temperature less than or equal to about 550° C. to convert it into a monolayer of rutile-type titanium oxide. Some embodiments include methods of forming capacitors that have rutile-type titanium oxide dielectric, and that have at least one electrode comprising titanium nitride. Some embodiments include thermally conductive stacks that contain titanium nitride and rutile-type titanium oxide, and some embodiments include methods of forming such stacks.
    Type: Application
    Filed: July 31, 2013
    Publication date: November 28, 2013
    Applicant: Micron Technology, Inc.
    Inventors: Nik Mirin, Tsai-Yu Huang, Vishwanath Bhat, Chris M. Carlson, Vassil N. Antonov