Patents by Inventor Vebjorn Nilsen

Vebjorn Nilsen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate carrier for parallel wafer processing reactor
    Publication number: 20050188923
    Abstract: A substrate carrier for a parallel wafer processing reactor supports a plurality of substrates. The substrate carrier includes a plurality of susceptors, which may be thermal plates or annular rings that are arranged horizontally in a vertical stack. The substrates are mounted between pairs of susceptors on two or more supports provided around the outer periphery of the susceptors. The number of substrates mounted between each pair of susceptors may the same or different but is two or more between at least one pair of susceptors.
    Type: Application
    Filed: October 15, 2004
    Publication date: September 1, 2005
    Inventors: Robert Cook, Ronald Stevens, Peter Schwartz, Cesar Tejamo, Vebjorn Nilsen, Gabriel Ormonde, Ajit Paranjpe, Somnath Nag, Michael Patten