Patents by Inventor Veit Gotze

Veit Gotze has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cleaning device and method for cleaning polishing cloths used for polishing semiconductor wafers
    Publication number: 20030216112
    Abstract: A cleaning device is used to clean a polishing pad and has a first cleaning system with a grinding wheel and a second cleaning system with a distributor for discharging a gas-water mixture at high pressure. The polishing pad, which is arranged on a polishing table, can be set in rotary motion, so that the surface sections that will be cleaned are first preliminarily cleaned by the grinding wheel and are then subjected to a second cleaning by the gas-water mixture of the distributor.
    Type: Application
    Filed: May 29, 2003
    Publication date: November 20, 2003
    Inventors: Veit Gotze, Rudiger Hunger