Patents by Inventor Vikas Gujar

Vikas Gujar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for enhancing tantalum filament life in hot wire chemical vapor deposition processes
    Patent number: 8709537
    Abstract: Methods for depositing films using hot wire chemical vapor deposition (HWCVD) processes are provided herein. In some embodiments, a method of operating an HWCVD tool may include providing hydrogen gas (H2) to a filament disposed in a process chamber of the HWCVD tool for a first period of time; and flowing current through the filament to raise the temperature of the filament to a first temperature after the first period of time.
    Type: Grant
    Filed: October 6, 2011
    Date of Patent: April 29, 2014
    Assignee: Applied Materials, Inc.
    Inventors: Bipin Thakur, Joe Griffith Cruz, Stefan Keller, Vikas Gujar, Ravindra Janu Patil
  • APPARATUS FOR FORMING ENERGY STORAGE AND PHOTOVOLTAIC DEVICES IN A LINEAR SYSTEM
    Publication number: 20130074771
    Abstract: A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.
    Type: Application
    Filed: November 20, 2012
    Publication date: March 28, 2013
    Inventors: VICTOR L. PUSHPARAJ, Pravin K. Narwankar, Dieter Haas, Bipin Thakur, Mahesh Arcot, Vikas Gujar, Omkaram Nalamasu
  • Apparatus and methods for forming energy storage and photovoltaic devices in a linear system
    Patent number: 8334017
    Abstract: A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.
    Type: Grant
    Filed: September 17, 2010
    Date of Patent: December 18, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Victor L. Pushparaj, Pravin K. Narwankar, Dieter Haas, Bipin Thakur, Mahesh Arcot, Vikas Gujar, Omkaram Nalamasu
  • METHODS FOR ENHANCING TANTALUM FILAMENT LIFE IN HOT WIRE CHEMICAL VAPOR DEPOSITION PROCESSES
    Publication number: 20120100312
    Abstract: Methods for depositing films using hot wire chemical vapor deposition (HWCVD) processes are provided herein. In some embodiments, a method of operating an HWCVD tool may include providing hydrogen gas (H2) to a filament disposed in a process chamber of the HWCVD tool for a first period of time; and flowing current through the filament to raise the temperature of the filament to a first temperature after the first period of time.
    Type: Application
    Filed: October 6, 2011
    Publication date: April 26, 2012
    Applicant: APPLIED MATERIALS, INC.
    Inventors: BIPIN THAKUR, JOE GRIFFITH CRUZ, STEFAN KELLER, VIKAS GUJAR, RAVINDRA JANU PATIL
  • APPARATUS AND METHODS FOR FORMING ENERGY STORAGE AND PHOTOVOLTAIC DEVICES IN A LINEAR SYSTEM
    Publication number: 20110100955
    Abstract: A method and apparatus are provided for formation of a composite material on a substrate. The composite material includes carbon nanotubes and/or nanofibers, and composite intrinsic and doped silicon structures. In one embodiment, the substrates are in the form of an elongated sheet or web of material, and the apparatus includes supply and take-up rolls to support the web prior to and after formation of the composite materials. The web is guided through various processing chambers to form the composite materials. In another embodiment, the large scale substrates comprise discrete substrates. The discrete substrates are supported on a conveyor system or, alternatively, are handled by robots that route the substrates through the processing chambers to form the composite materials on the substrates. The composite materials are useful in the formation of energy storage devices and/or photovoltaic devices.
    Type: Application
    Filed: September 17, 2010
    Publication date: May 5, 2011
    Applicant: Applied Materials, Inc.
    Inventors: VICTOR L. PUSHPARAJ, Pravin K. Narwankar, Dieter Haas, Bipin Thakur, Mahesh Arcot, Vikas Gujar, Omkaram Nalamasu