Patents by Inventor Vincent Calia

Vincent Calia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for producing extreme ultra-violet light for use in photolithography
    Patent number: 6133577
    Abstract: A method and apparatus for producing extreme ultra-violet light comprising a nozzle for flowing a gas at a supersonic velocity, a source for directing a radiated energy beam into the flowing gas to stimulate emission of extreme ultra-violet light therefrom, and a diffuser for capturing a substantial portion of the gas so as to mitigate contamination caused thereby. The extreme ultra-violet light so produced is suitable for use in photolithography for integrated circuit fabrication and the like.
    Type: Grant
    Filed: February 4, 1997
    Date of Patent: October 17, 2000
    Assignee: Advanced Energy Systems, Inc.
    Inventors: Robert M. Gutowski, Vincent Calia, Alan M. Todd