Patents by Inventor Vinyu Greenlee

Vinyu Greenlee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and method
    Patent number: 7675606
    Abstract: According to one of the aspects of the present invention there is provided a substrate carrier arranged to hold a substrate in position using a vacuum, the vacuum being established in a sealed space created between the substrate carrier and the substrate.
    Type: Grant
    Filed: May 5, 2006
    Date of Patent: March 9, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Enno Van Den Brink, Henricus Wilhelmus Maria Van Buel, Joseph Consolini, Gerardus Johannes Joseph Keijsers, Klaus Simon, Johannes Theodoor De Smit, Richard Joseph Travers, Maurice Anton Jaques Teuwen, Arnout Johannes Meester, Frederick William Hafner, Vinyu Greenlee, Hubertus Antonius Marinus Baijens
  • Lithographic apparatus and method
    Publication number: 20090128792
    Abstract: A method is disclosed that includes introducing a substrate into a pre-aligner of a lithographic apparatus, using a detector to measure the location of an alignment mark provided on a side of the substrate which is opposite to the location of the detector, and after measurement, putting the substrate onto a substrate table of the lithographic apparatus, the substrate being positioned on the substrate table such that the alignment mark provided on the opposite side of the substrate is visible through a window of the substrate table.
    Type: Application
    Filed: October 9, 2008
    Publication date: May 21, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Rudy Jan, Maria Pellens, Keith Frank Best, Richard Joseph Travers, Frederick William Hafner, Vinyu Greenlee
  • Lithographic apparatus and method
    Publication number: 20070258080
    Abstract: According to one of the aspects of the present invention there is provided a substrate carrier arranged to hold a substrate in position using a vacuum, the vacuum being established in a sealed space created between the substrate carrier and the substrate.
    Type: Application
    Filed: May 5, 2006
    Publication date: November 8, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Enno Brink, Henricus Wilhelmus Van Buel, Joseph Consolini, Gerardus Johannes Keijsers, Klaus Simon, Johannes De Smit, Richard Travers, Maurice Anton Teuwen, Arnout Meester, Frederick Hafner, Vinyu Greenlee, Hubertus Antonius Baijens