Patents by Inventor Vivien Chua

Vivien Chua has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing systems and methods to control process drift
    Patent number: 11430641
    Abstract: Exemplary methods of semiconductor processing may include forming a plasma of a fluorine-containing precursor. The methods may include performing a chamber clean in a processing region of a semiconductor processing chamber. The processing region may be at least partially defined between a faceplate and a substrate support. The methods may include generating aluminum fluoride during the chamber clean. The methods may include contacting surfaces within the processing region with a carbon-containing precursor. The methods may include volatilizing aluminum fluoride from the surfaces of the processing region.
    Type: Grant
    Filed: July 2, 2021
    Date of Patent: August 30, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Vivien Chua, Prashant Kumar Kulshreshtha, Zhijun Jiang, Fang Ruan, Diwakar Kedlaya