Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: A device and method for ionization control is provided. The device and method controls the ionization balance using a sensor element, a control circuit that produces output signal as a function of an input signal from the sensor and transmits that output signal to the ionizer being controlled. The device also has a mechanism for detecting rapid changes in the input signal and a mechanism for disabling changes in the control signal for the duration of presence of said rapidly-changing signal.

Abstract: An ESD and transient signal monitoring system and method are provided wherein an ESD monitoring device may be used to continuously monitor ESD events and generate an indicating of the magnitude of the ESD events. A method for protecting an electronic device from ESD events is also described.

Abstract: A system and method for measuring process parameters in a process machine is described. The system is synchronized to the operation of the process machine so that spurious process parameters events are filtered out.

Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device includes sensors for detecting the parameters and converting them to sensor outputs and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also include an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: An ESD and transient signal monitoring system and method are provided wherein an ESD monitoring device may be used to continuously monitor ESD events and generate an indicating of the magnitude of the ESD events. A method for protecting an electronic device from ESD events is also described.

Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device includes sensors for detecting the parameters and converting them to sensor outputs, a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device also includes an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: An ESD and transient signal monitoring system and method are provided wherein an ESD monitoring device may be used to continuously monitor ESD events and generate an indicating of the magnitude of the ESD events. A method for protecting an electronic device from ESD events is also described.

Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: The present invention provides a device for in-situ measurement and recording of various environmental parameters in a semiconductor fabrication process. The device comprises sensors for detecting the parameters and converting them to sensor outputs; and a data logger coupled to the sensors for receiving the sensor outputs and logging them in a file. The device may also comprise an analog to digital converter to convert the sensor outputs to digital data and a communication module to communicate the digital data with other devices. When applied to reticles used in a semiconductor fabrication process comprising a plurality of stages, the device may be used to monitor electrostatic field and electrostatic discharge activities on and around the reticle, convert the monitored parameters into data, and log the data along with a timestamp and an identification of each individual stage.

Abstract: An apparatus for detecting, locating and measuring electromagnetic radiation is provided. The apparatus may be a self-contained, portable device which permits a user to detect, locate and measure electromagnetic radiation from distance away from the radiation source in presence of interference.

Abstract: A system for protecting an electronic device from electromagnetic radiation is provided that receives electromagnetic radiation impinging on said electronic device, determines a value of a characteristic of said electromagnetic radiation, generates a testing signal when said value of said characteristics of said electromagnetic radiation is greater than a predetermined value, and tests said electronic device in response to said testing signal to determine if said electromagnetic radiation has affected said electronic device. A method for protecting an electronic device from electromagnetic radiation is also provided.

Abstract: Apparatus for detection of the electro-magnetic field and measurement of its strength in the near field. The apparatus includes an antenna suited to receive specified type of the electro-magnetic field; a detector to convert received signal into DC voltage, a summing device and a potentiometer to set the reference level, a DC amplifier for amplification of resulting signal. The apparatus further includes a voltage-controlled oscillator and a speaker that produces an audible tone with the pitch proportional to the field strength. The apparatus further includes a squelch circuit that blocks the sound when the field strength gets lower than the preset range. The apparatus further includes LED level bar as visual means of indicating field strength. The apparatus is constructed as a fully self-contained unit needing no additional equipment for its operation.

Abstract: An apparatus 10 controls the two-way communication between the microphone 12 and speaker 36 of a telephone headset and a telephone base. A transmit channel 15 includes an expander 18 that controllably attenuates the transmitted communication signal when the user is not speaking into the microphone 12. Conversely, a receive channel 30 includes a compressor 34 that controllably attenuates the received communication signal to prevent over driving the speaker 36.

Abstract: Apparatus is provided for interfacing a voice communication instrument, e.g. headset, to a communication link, e.g. a telephone line. The interface includes a transmit channel having amplification, frequency shaping and voice switching to suppress background noise. The interface includes a receive channel having compression limiting as a function of the received signal amplitude and frequency. The interface further includes a power-down circuit and a low battery indicator.

Abstract: A telephone headset is connected to a telephone line through a interface module having programmable signal conditioning characteristics. The interface module is universal in that it can be programmed for use with many different headset or handset units. The interface module is automatically programmed through a multi-pin connector carried on the headset or handset connecting cable. The pin arrangement in the connector when plugged into a mating receptacle connector of the interface module produces binary input signals which can be decoded into programming signals for the signal conditioning circuit in the module.