Abstract: A pellicle membrane for use in a lithographic apparatus, the pellicle membrane characterized by in plane variation in composition is described. A method of manufacturing a pellicle membrane, the method including: providing a first material layer on a sacrificial layer on a substrate; providing a photoresist layer on the first material layer; patterning the photoresist layer; etching the first material layer to form a patterned surface; and either i) depositing a layer of a second material on the patterned surface and subsequently lifting off the portion of the second material deposited on the patterned photoresist layer, or ii) removing the remaining photoresist layer, depositing a layer of a second material on the patterned surface, and subsequently planarizing the surface.

Abstract: An optical element for a lithographic apparatus, the optical element including an anchor layer selected to support a top layer having self-terminating growth in an operating lithographic apparatus or plasma containing environment. Also described is a method of manufacturing an optical element, the method including depositing a top layer on anchor layer via exposure to plasma, preferably electromagnetically induced plasma. Lithographic apparatuses including such optical elements are also described.

Abstract: A pellicle membrane for a lithographic apparatus, the membrane including a matrix including a plurality of inclusions distributed therein. A method of manufacturing the pellicle membrane, a lithographic apparatus including the pellicle membrane, a pellicle assembly for use in a lithographic apparatus including the membrane, as well as the use of the pellicle membrane in a lithographic apparatus or method.

Abstract: A light-emitting device is provided, comprising at least one light-emitting diode (100) for emitting light of a first color and a luminescent material (102) arranged on said at least one light-emitting diode to receive at least part of the light emitted by said light-emitting diode. The light-emitting device further comprises a filter (103) arranged to receive light emitted by said light-emitting diode (100) and transmitted through said luminescent material (102) and to absorb light of said first color. The filter comprises a pigment compound distributed in a matrix of silicon and oxygen atoms, in which matrix at least a portion of said silicon atoms are directly bonded to hydrocarbon groups.

Abstract: The subject of the present invention is a dielectric barrier discharge (DBD-) lamp (1) for generating and emitting an ultraviolet radiation with ignition aid comprising: a discharge gap (2) being at least partly formed and/or surrounded by at least an inner wall (5) and an outer wall (4), whereby at least one of the walls (4, 5) is a dielectric wall and at least one of the walls (4, 5) has an at least partly transparent part, a filling located inside the discharge gap (2), at least two electrical contacting means, a first mean for electrical contacting associated with the outer wall (4) and a second mean for electrical contacting associated with the inner wall (5), whereby at least one multifunctional means (3) is arranged adjacent to the discharge gap (2) functioning as guiding aid and as ignition aid.

Abstract: The invention relates to a high-pressure metal halide lamp, comprising an arc tube (1) comprising a metal halide containing discharge medium for supporting an electrical discharge, an outer envelope (15) surrounding said arc tube (1), and a phosphor coating (14) on the inner surface of said outer envelope (15), said phosphor coating comprising a blue emitting phosphor. Preferably, the blue emitting phoshor is selected from the group consisting of (Ba,Ca)1.29Al12019.29:Eu, Sr5(P04)3Cl:Eu, BaMgAl10017:Eu, Si2Al6011:Eu, BaAl8013:Eu, Sr4Al14025:EU, and BaMgAl10O17:Eu,Mn.

Abstract: A light-emitting device is provided, comprising at least one light-emitting diode (100) for emitting light of a first color and a luminescent material (102) arranged on said at least one light-emitting diode to receive at least part of the light emitted by said light-emitting diode. The light-emitting device further comprises a filter (103) arranged to receive light emitted by said light-emitting diode (100) and transmitted through said luminescent material (102) and to absorb light of said first color. The filter comprises a pigment compound distributed in a matrix of silicon and oxygen atoms, in which matrix at least a portion of said silicon atoms are directly bonded to hydrocarbon groups.

Abstract: The invention relates to a high-pressure discharge lamp intended for use in assimilation lighting. According to the invention, the high-pressure discharge lamp has a discharge vessel with a long axis, enclosing a volume V wherein an ionizable filling comprising a buffer gas and an excess amount of a metal halide, which is selected from LiI, NaI and CaI2, is present, the discharge vessel having an inflated shape wherein at least the ends are non-cylindrical and curved towards the long axis at both ends, with an inner wall area A for which it holds that A/V<6.6.

Abstract: A low-pressure mercury vapor discharge lamp has a light-transmitting discharge vessel (10) enclosing, in a gastight manner, a discharge space (13) provided with a filling of mercury and a rare gas. The discharge vessel comprises discharge means for maintaining a discharge in the discharge space. The discharge vessel is provided with a luminescent layer (17) comprising a mixture of at least a red and a green luminescent material. The red luminescent material comprises (Y,Gd)2O3:Eu. The green luminescent material comprises (Ba,Ca,Sr)2SiO4:Eu and/or (Sr,Ca,Ba,Mg,Zn)Si2N2O2:Eu. Particles of the green luminescent material are surrounded by a coating of aluminum oxide. Preferably, at least 50% of the particles of the green and red luminescent materials have an average diameter greater than or equal to approximately 5 ?m. The mixture of the red and green luminescent materials render a low-pressure mercury-vapor discharge lamp with an improved lumen equivalent.

Abstract: The invention relates to a high pressure discharge lamp intended for use in assimilation lighting. According to the invention the high-pressure discharge lamp has a discharge vessel, which besides a buffer gas, comprises substantially LiI as metal halide or a mixture of LiI and NaI.

Abstract: The subject of the present invention is a dielectric barrier discharge (DBD-) lamp (1) for generating and emitting an ultraviolet radiation with ignition aid comprising: a discharge gap (2) being at least partly formed and/or surrounded by at least an inner wall (5) and an outer wall (4), whereby at least one of the walls (4, 5) is a dielectric wall and at least one of the walls (4, 5) has an at least partly transparent part, a filling located inside the discharge gap (2), at least two electrical contacting means, a first mean for electrical contacting associated with the outer wall (4) and a second mean for electrical contacting associated with the inner wall (5), whereby at least one multifunctional means (3) is arranged adjacent to the discharge gap (2) functioning as guiding aid and as ignition aid.

Abstract: An ultraviolet reflecting layer and a fluorescent lamp is described, comprising an envelope having an inner surface, means within the lamp envelope for generating ultraviolet radiation, a light emitting layer of a luminescent material for generating visible light when impinged by ultraviolet radiation, and said ultraviolet reflecting layer, located between the light emitting layer and the inner surface of the lamp envelope, wherein the ultraviolet reflecting layer comprises a metal phosphate and/or a metal borate, with the metal being selected from Sc, Y, La, Gd, Lu and Al, or combinations thereof. The phosphates or borates used in the ultraviolet reflecting layer may optionally be doped by a Tb3+ and/or Dy3+ activator, to further improve the quantum yield of the conversion of UV radiation into visible light.

Abstract: In an UV-reflecting layer for discharge lamps, the layer comprises at least 0.1% by weight of Al2O3 and at least 0.1% by weight of a material having a higher refractive index than Al2O3, so that as large a proportion of UV light as possible can be reflected and as large a portion of visible light as possible can be emitted by the lamp.

Abstract: In an UV-reflecting layer for discharge lamps, the layer comprises at least 0.1% by weight of Al2O3 and at least 0.1% by weight of a material having a higher refractive index than Al2O3, so that as large a proportion of UV light as possible can be reflected and as large a portion of visible light as possible can be emitted by the lamp.

Abstract: The low-pressure mercury vapor discharge lamp has a filling of mercury and an inert gas, and the glass discharge vessel (1) is provided on the inner surface (4) of the wall (3) with a film (6) of trifluoride and/or oxyfluoride of at least one element, which is trivalent at most, which is selected from lanthanides, lanthanum, scandium and yttrium. The film (6) counteracts transport of mercury from the discharge vessel to the wall (3) and of alkali from the wall (3) to the discharge vessel. In this manner, a decrease of the lamp's efficiency and of the service life are counteracted.

Abstract: The invention relates to a luminaire (1) comprising a reflector body (9) having a reflecting part (2) provided with a light reflective coating (5), and comprising contact means (6) for electrically connecting a light source. The coating (5) comprises at least two, light reflective particle groups, the groups exhibiting a mutually different color because of an interference layer (12a-d) provided on the particles (10a-d) which is different for the respective groups. A white color impression of the coating (5) is obtainable when the groups are jointly used in relative proportions in the coating (5). The coating (5) does not suffer from intrinsic absorption, or from color shift.

Abstract: The invention relates to a luminaire (1) comprising a reflector body (9) having a reflecting part (2) provided with a light reflective coating (5), and comprising contact means (6) for electrically connecting a light source. The coating (5) comprises at least two, light reflective particle groups, the groups exhibiting a mutually different color because of an interference layer (12a-d) provided on the particles (10a-d) which is different for the respective groups. A white color impression of the coating (5) is obtainable when the groups are jointly used in relative proportions in the coating (5). The coating (5) does not suffer from intrinsic absorption, or from color shift.

Abstract: In an UV-reflecting layer for discharge lamps, the layer comprises at least 0.1% by weight of Al2O3 and at least 0.1% by weight of a material having a higher refractive index than Al2O3, so that as large a proportion of UV light as possible can be reflected and as large a portion of visible light as possible can be emitted by the lamp.