Abstract: Disclosed is a control apparatus having an indicator and a control which are used to display and change two different types of parameters in two modes of operation of the apparatus. The apparatus includes a control panel and a movable panel which can be moved to alternately overlay and expose at least a portion of the control panel. Switch means are provided to condition the apparatus to operate in a first mode in which the indicator displays a first type of parameter and the control selects or adjusts the value of the first parameter while the apparatus is automatically prevented from operating in a second mode of operation. The switch means further conditions the apparatus to operate in the second mode in which the indicator displays a second type of parameter and the control selects or adjusts the value of the second parameter while the apparatus is automatically prevented from operating in the first mode.

Abstract: An electronic controller having a detachably mounted front panel unit on which display devices and control elements are arranged is disclosed. By means of the control elements, the process variables and the control parameters are changed incrementally. Values of the control parameter, process variables, and the selected control parameter are indicated by the display devices. To provide a compact, independent front panel unit which can be removed from the main housing of the controller for protection against unauthorized operation, the front panel unit is provided with a slave microprocessor which is connected via a plug-in connector to a master microprocessor in the main housing. Because the master microprocessor operates independently of the front panel mounted slave microprocessor, the front panel unit can be removed without affecting the operation of the controller.

Abstract: An improved transmission-type, scanning charged-particle beam microscope including a television camera tube and a television display tube for generating and displaying a diffraction image of a specimen to be examined. The improvement of the invention comprises the provision of a transparent fluorescent screen disposed in the ray cone of the beam behind the specimen along the beam path in the microscope, light-optical means adapted for imaging the fluorescent screen on a target of the television camera tube, and detector means for integrally detecting radiation emanating from the fluorescent screen.

Abstract: An improved method for pictorially displaying a diffraction image in a transmission-type, scanning, corpuscular-beam microscope in which a beam detector is scanned by a diffraction image moved by a deflection system in line-raster fashion in a first, predetermined direction over the beam detector. The beam detector generates an output signal for controlling the brightness of a television monitor which displays the diffraction image.

Abstract: A scanning transmission-type electron microscope including an annular-shaped detector disposed concentrically with respect to the optical axis of the microscope behind a specimen along the microscope beam path, and means for amplifying output signals generated by the detector. The detector comprises a scintillation detector and the microscope includes a photoelectron multiplier coupled to the detector and disposed outside the microscope beam. A curved light guide is also coupled to the detector and the photoelectron multiplier and includes a canal which extends through the light guide along the microscope axis for permitting the passage of a central ray cone of the electron beam of the microscope through the light guide.

Abstract: A method and apparatus for focusing the objective lens of a scanning transmission-type corpuscular-beam microscope. In the method, the beam of the microscope is deflected by a deflection system excited in sawtooth fashion and generates a raster consisting of parallel lines on the specimen to be examined. The microscope includes a beam radiation detector disposed behind the specimen along the beam path which generates an output signal which controls the brightness of a picture tube monitor operated synchronously with the raster. The improvement of the invention comprises the steps of measuring, during the exposure of a specimen point, partial beam radiation intensities in the cone of the beam at two points disposed symmetrical with respect to the longitudinal axis of the beam cone by means of the detector, the effective input area of the detector being smaller than the cross-sectional area of the cone of the beam at the same height in the microscope.

Abstract: A method for pictorially displaying output information generated in the form of an electrical signal by an apparatus for imaging an object which includes a first display means for visually displaying a working image of the object and a second display means for visually displaying an orientation image of the object. The orientation image is obtained by varying the operating parameters of the apparatus and is displayed simultaneously with the working image. The improvement of the invention comprises the steps of generating the orientation image once, storing the orientation image in an image storage means, and then reproducing the orientation image from the generated image stored in the image storage means.

Abstract: A method of operating a particle-beam apparatus such as an electron microscope and the like equipped with a deflection system arranged at the beam path and a control device operatively connected to the deflection system includes adjusting the excitation of the deflection system by means of the control device to direct the particle-beam for a selectable time period onto a location of the object whereat the object is to be investigated and, again adjusting the excitation of the deflection system by means of the control device to direct the particle-beam in the remaining time to another location of the object whereat the particle-beam passes through the object, the last-mentioned location being disposed laterally of the first-mentioned location.

Abstract: A device for setting an electric command variable comprising parallel circuit branches for the coarse and fine adjustment of the variable is disclosed. In particular, the fine and coarse adjustment branches each include a digital bi-directional counter and a digital-analog converter. Upon exceeding the limits of the conversion range of the digital-to-analog converter of the fine branch, the counter therein is adjusted to a value which corresponds to a middle setting of its associated converter. To prevent the latter adjustment from causing a variation of the analog command variable, a corresponding correction of the counter in the coarse branch is then made. The present device has particular application in the setting of the energizing currents in magnetic lenses of an electron microscope.