Patents by Inventor Volodymyr Temchenko

Volodymyr Temchenko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatuses for template cooling
    Patent number: 9454090
    Abstract: Disclosed are cooling apparatus and methods of cooling a template. The cooling apparatus includes a reticle and an optical cooling material. The reticle includes patterning for at least partially reflecting patterning radiation incident on a first side of the reticle. The optical cooling material is in thermally-conductive coupling with the reticle mount and is configured to produce cooling when exposed to a laser radiation. More particularly, the optical cooling material includes a glass material that exhibits anti-Stokes fluorescence that produces cooling of the glass material when exposed to an infrared laser beam. In some embodiments, the cooling apparatus may be incorporated with a reticle mount. The reticle mount is in thermally-conductive coupling with a second side of the reticle.
    Type: Grant
    Filed: August 28, 2012
    Date of Patent: September 27, 2016
    Assignee: Micron Technology, Inc.
    Inventors: Hongqian Sun, Jianming Zhou, Volodymyr Temchenko
  • METHODS AND APPARATUSES FOR TEMPLATE COOLING
    Publication number: 20140063476
    Abstract: Disclosed are cooling apparatus and methods of cooling a template. The cooling apparatus includes a reticle and an optical cooling material. The reticle includes patterning for at least partially reflecting patterning radiation incident on a first side of the reticle. The optical cooling material is in thermally-conductive coupling with the reticle mount and is configured to produce cooling when exposed to a laser radiation. More particularly, the optical cooling material includes a glass material that exhibits anti-Stokes fluorescence that produces cooling of the glass material when exposed to an infrared laser beam. In some embodiments, the cooling apparatus may be incorporated with a reticle mount. The reticle mount is in thermally-conductive coupling with a second side of the reticle.
    Type: Application
    Filed: August 28, 2012
    Publication date: March 6, 2014
    Applicant: Micron Technology, Inc.
    Inventors: Hongqian Sun, Jianming Zhou, Volodymyr Temchenko