Patents by Inventor Vrunda Bhagwat

Vrunda Bhagwat has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Recipe editor for editing and creating process recipes with parameter-level security for various kinds of semiconductor-manufacturing equipment
    Patent number: 6665575
    Abstract: A universal recipe editor for editing of semiconductor-manufacturing recipes. The universal recipe editor can read recipes from a wide variety of semiconductor-manufacturing machines from different manufacturers using recipe distributed object model (R-DOM) files. An R-DOM file is generated for each kind of recipe-file format to locate process parameters within proprietary recipe-file formats. The sequence of parameters in the R-DOM file matches the sequence in the recipe data file so that parameter may be mapped from recipe data files for display and editing. ASCII or binary recipe file formats are mapped from the recipe data file using R-DOM objects. Revision and authorng information is kept in a recipe information file for each recipe.
    Type: Grant
    Filed: January 18, 2002
    Date of Patent: December 16, 2003
    Assignee: FabCentric, Inc.
    Inventors: Manoj Betawar, Vrunda Bhagwat, Dinesh Goradia, Manish Mehta, Nitin Parekh
  • Recipe editor for editing and creating process recipes with parameter-level semiconductor-manufacturing equipment
    Patent number: 6415193
    Abstract: A universal recipe editor is for off-line viewing and editing of semiconductor-manufacturing recipes. The universal recipe editor can read recipes from a wide variety of semiconductor-manufacturing machines from different manufacturers using recipe distributed object model (R-DOM) files. An R-DOM file is generated for each kind of recipe-file format to locate process parameters within proprietary recipe-file formats. The sequence of parameters in the R-DOM file matches the sequence in the recipe data file so that parameters may be mapped from recipe data files for display and editing. ASCII or binary recipe file formats are mapped from the recipe data file using R-DOM objects. Revision and authoring information is kept in a recipe information file for each recipe. Each line of the recipe data file can specify a different process parameter. Security or access rights for each parameter is added for each parameter by including security codes on each line in the R-DOM file.
    Type: Grant
    Filed: July 8, 1999
    Date of Patent: July 2, 2002
    Assignee: FabCentric, Inc.
    Inventors: Manoj Betawar, Vrunda Bhagwat, Dinesh Goradia, Manish Mehta, Nitin Parekh
  • Recipe editor for editing and creating process recipes with parameter-level security for various kinds of semiconductor-manufacturing equipment
    Publication number: 20020055804
    Abstract: A universal recipe editor is for off-line viewing and editing of semiconductor-manufacturing recipes. The universal recipe editor can read recipes from a wide variety of semiconductor-manufacturing machines from different manufacturers using recipe distributed object model (R-DOM) files. An R-DOM file is generated for each kind of recipe-file format to locate process parameters within proprietary recipe-file formats. The sequence of parameters in the R-DOM file matches the sequence in the recipe data file so that parameters may be mapped from recipe data files for display and editing. ASCII or binary recipe file formats are mapped from the recipe data file using R-DOM objects. Revision and authoring information is kept in a recipe information file for each recipe. Each line of the recipe data file can specify a different process parameter. Security or access rights for each parameter is added for each parameter by including security codes on each line in the R-DOM file.
    Type: Application
    Filed: January 18, 2002
    Publication date: May 9, 2002
    Inventors: Manoj Betawar, Vrunda Bhagwat, Dinesh Goradia, Manish Mehta, Nitin Parekh