Abstract: A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The storage chamber pressure varies between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber.

Abstract: A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The storage chamber pressure varies between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber.

Abstract: A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The storage chamber pressure varies between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber. The transfer apparatus includes a robot arm; a thin flat wafer carrying blade at the leading end of the robot arm configured for engaging a wafer from the storage cassette or the elevator; and a wafer support tray configured for removable engagement with the blade and for engaging and positively positioning a wafer from the elevator, or a support pedestal within a processing chamber.

Abstract: A semiconductor wafer processing system for processing wafers from a wafer storage cassette includes a wafer transfer chamber; a wafer storage elevator within the transfer chamber; one or more wafer processing chambers; and a wafer transfer apparatus for transferring a wafer between a standard storage cassette adjacent and outside the transfer chamber and the elevator, and between the elevator and the processing chamber. The environment of the storage chamber varies in pressure between atmospheric when accepting wafers from outside, and a subatmospheric pressure when transferring wafers to or from a processing chamber.

Abstract: A transportable container for articles to be processed, for use with a passage elevator for passing the articles between locations, is provided which comprises: a box defining a box opening; a box door for being received by the box opening; a cassette for holding the articles, the cassette supported by the box door and sized for passage through the box opening, the passage elevator passing the cassette through the box opening; a retainer, extending adjacent to the cassette, for substantially retaining the articles held by the cassette, the retainer being movably coupled to the box such that the retainer can move in a direction substantially transverse to a direction of movement of the holder substantially during a passage of the cassette through the box opening.

Abstract: The present invention is a transportable container for storing articles and maintaining a clean article, such as semiconductor wafers, clean. The container provides a box which defines an interior space for containing the articles. The box includes a box top and box base which supports the box top and includes a box door for opening and closing the container. The box door provide a region for supporting the articles in the interior space. A liner is insertable into the interior space and surrounds the region. The box door is retractable from the box space. The articles in the region are retractable with the box door.

Abstract: The present invention is an apparatus for maintaining articles, such as semiconductor wafers clean. The wafers or other articles to be processed are placed in a box having first and second regions for making first and second seals. A box door seals the articles into the box. The box has a second region for making the second seal and has a third region for making a third seal. The box is used to transport the wafers to a port in the canopy of the processing equipment. The port is adapted for receiving the box and box door and for transferring the box door and the contents of the box into a region beneath the canopy. The canopy has a first region for making the first seal with the box. Also, the canopy has a fourth region surrounding the port for making a fourth seal. A port door is provided for closing the canopy port when no box is present. The port door has a second region for making the second seal with the box and has a fourth region for making the fourth seal with the canopy.