Abstract: The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.

Abstract: The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.

Abstract: This disclosure relates to connection systems for fluid connections. Even more particularly, some embodiments relate to fluid connections for use with semiconductor manufacturing fluids. The connection system uses a connection nut (110) that seals fluid fittings (112, 114) with less than 360 degrees of rotation of the connection nut by making use of multi-start threads in the nut (110). According to one embodiment, the connection nut creates at least 360 degrees of threaded engagement with less than 360 degrees of rotation. Embodiments further provide connection systems that can seal multiple ports simultaneously.

Abstract: A data processing unit includes a number of tightly coupled central subsystems, a number of peripheral subsystems, a main memory and a system management facility all coupled in common to a system bus. The system management unit has top priority on the system bus and includes centralized resources which provide apparatus for indicating the status of power and temperature, booting the subsystems, testing the subsystems, timing central subsystem functions, and allowing local and remote maintenance access to the subsystems. The system management facility receives commands from the central subystem to read from and write into the timers as well as to read the status of the overall system. The system management facility generates special commands to the central subsystem to indicate when the timers have decremented to ZERO as well as special commands to aid in hardware and software debugging.

Abstract: A multiprocessor data processing system includes a system management facility which controls the loading of each control store in the respective multiprocessor. The system management facility generates a sequence of commands which puts a processor in load mode, initializes a control store address register, transfers firmware words from a main memory to the control store, resets the load mode, starts a verify operation and checks the result of the verify operation.