Abstract: In a process of making a microstructured plastic mold from which structures can be formed galvanically a compound layer including an electrically conductive and an insulating layer portion is provided and is heated, and impressed into the insulating layer portion is a tool which has microstructured bodies disposed thereon of a height corresponding at least to the thickness of the insulating layer portion and with rough front surfaces having points and ridges adapted to penetrate the electrically insulating layer thereby to expose the electrically insulating layer at the bottom of the cavities formed by microstructured bodies.

Abstract: In a process for producing microstructure components on a substrate which carries electronic microcircuits cooperating functionally with the microstructure components, a first layer of a plastic material which connects with the substrate is applied to the substrate and a second layer of a plastic material which includes a separating agent but which firmly connects with the first layer is applied to the first layer and a molding tool is then impressed into the second layer to form the desired microstructures or to form cavities into the plastic material, which, upon removal of the molding tool, are filled with a metal to form the desired microstructures on the substrate upon removal of the plastic material.

Abstract: For a process of making a microstructured plastic mold from which structures can be formed galvanically, a compound layer, including an electrically conductive and an insulating layer portion, is provided and is heated and impressed into the insulating layer portion, a tool is provided which has microstructured bodies disposed thereon of a height corresponding at least to the thickness of the insulating layer portion and with rough from surfaces having points and ridges adapted to penetrate the electrically insulating layer thereby to expose the electrically insulating layer at the bottom of the cavities formed by microstructured bodies.

Abstract: A method of making microstructure bodies of plastic material. A microstructured plate-like base body which is made by any known molding procedure and which has a first side serving as a first reference plane and a second side which has plastic microstructures projecting therefrom is covered at its second side with a material layer that engages the microstructures, whereupon the material layer is machined to provide a second reference surface parallel to the first reference surface and the base body is then machined parallel to the second reference surface to expose the microstructures projecting therefrom and the material layer is finally removed selectively with respect to the plastic material to release the microstructured bodies.

Abstract: A method of producing microstructures having regions of different structural height includes providing a layer of positive resist material that is sensitive to X-ray radiation with microstructures on a side facing a source of X-rays. Using a mask, the layer of a positive resist material is partially irradiated with the X-rays. The irradiated regions are removed with the aid of a developer.

Abstract: In a method of making molds with microstructured recesses having a continuous base covered by a film of an electrically conductive material for forming in the recesses, by electrodeposition, microstructured plate-like bodies a microstructure master mold is pressed into a layer of thermoplastic material coated with a film of an electrically conductive material at a temperature which is above the softening temperature of the thermoplastic material such that the thermoplastic material with the electrically conductive film thereon first contacts the microstructure face and then enters the recesses in the microstructure. The master mold and thermoplastic material are then cooled and the master mold is removed whereby the thermoplastic material provides a negative mold of the microstructure having a continuous electrically conductive film disposed on the recess bases whereas the remainder of the electrically conductive film is broken apart and disposed in isolated spangles on the rest of the microstructured mold.

Abstract: A method for preventing fluoroelastomer-related hydrolysis of a gas stream comprised of a fluorine-containing substance and contained in an industrial system provided with at least one fluoroelastomeric article, including the step of including in portions of the industrial system which contact the gas stream only fluoroelastomeric articles comprised of a fluoroelastomer and lead oxide, the lead oxide content corresponding to a lead percentage in the fluoroelastomer ranging from 1 to 10 percent by weight preferably from 1 to 5 percent by weight, optionally 3 percent by weight. The fluoroelastomeric article may be a seal for the industrial gas stream-handling system. Further, the fluorine-containing substance may be selected from the group consisting of UF.sub.6, HF, BF.sub.3, SiF.sub.4, MoF.sub.6, WF.sub.6, halogen fluorides, and mixtures thereof.

Abstract: A process for removing adhering or dust-like deposits in an apparatus which handles uranium hexafluoride. The process includes the steps of:(a) reacting the deposits with a gaseous boron halogenide other than boron trifluoride, to form at least one uranium halogenide; and(b) reacting the at least one uranium halogenide with a fluorine containing substance to form uranium hexafluoride.

Abstract: This invention pertains to a method for removing deposits of uranium compounds in uranium hexafluoride handling equipment. A fluorocarbon containing bromine is internally injected into the handling equipment at or below ambient pressure and this brominating agent removes uranium compounds which have been formed therein. A fluoridating agent is also preferably used in conjunction with the fluorocarbon containing bromine.