Patents by Inventor Walter Demel

Walter Demel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for fixing thin and flexible substrates
    Patent number: 6966560
    Abstract: A device or chuck for fixing thin and/or flexible substrates allows a uniform and all-over sucking-up of the substrates without any disadvantageous warping or bending. The chuck has notches and holes communicating with a plurality of microgrooves arranged on the bearing surface. If a vacuum device sucks off air through the bores and the notches, a vacuum extends in the microgrooves so that a substrate located on the bearing surface is sucked up.
    Type: Grant
    Filed: July 31, 2003
    Date of Patent: November 22, 2005
    Assignee: Suss MicroTec Lithography GmbH
    Inventors: Walter Demel, Ralph Zoberbier
  • Device for fixing thin and flexible substrates
    Publication number: 20040104326
    Abstract: A device or chuck for fixing thin and/or flexible substrates allows a uniform and all-over sucking-up of the substrates without any disadvantageous warping or bending. The chuck has notches and holes communicating with a plurality of microgrooves arranged on the bearing surface. If a vacuum device sucks off air through the bores and the notches, a vacuum extends in the microgrooves so that a substrate located on the bearing surface is sucked up.
    Type: Application
    Filed: July 31, 2003
    Publication date: June 3, 2004
    Inventors: Walter Demel, Ralph Zoberbier