Abstract: The present invention is aimed at providing measurement method for vibration displacement using state variation principle which achieves real time implementation through super high-speed DSP or FPGA as well as improves precision as much as picometer level and at the same time saves memory capacity compared to conventional invention.

Abstract: The present invention is aimed at providing measurement method for vibration displacement using state variation principle which achieves real time implementation through super high-speed DSP or FPGA as well as improves precision as much as picometer level and at the same time saves memory capacity compared to conventional invention.

Abstract: Provided is a dynamic balancing apparatus using a simple harmonic angular motion, including a rotational shaft on which a rotational body having an unbalanced mass is installed; a simple angular motion generator for periodically vibrating the rotational shaft; a support for supporting both sides of the rotational shaft; an angular vibration measuring sensor for measuring the simple harmonic angular motion of the rotational shaft; and force or vibration transducers for measuring applied force acting on or vibration transferred to the support by means of the simple harmonic motion of the unbalance mass.

Abstract: Provided is a dynamic balancing apparatus using a linear time-varying angular velocity model, which includes a rotational shaft on which a rotational body having a rotating unbalanced mass is installed; a linear time-varying angular velocity generator which allow the rotational shaft to be rotated at a linear time-varying angular velocity; a support for supporting both sides of the rotational shaft; and a transducer for measuring applied force or vibration transferred to the support by revolution of the rotational shaft having a linear time-varying angular velocity.

Abstract: The present invention such as active diagnostic algorithms is developed not only to realize the early detection of degraded vacuum pumps for the protection of pump failure but also to provide their predictive maintenance. According to the present invention, it is possible to find simple and effective ways to deal with technical problems arising from the large variability of the pump-by-pump operation characteristics and the multiple process conditions where pumps run under the idle operation and gas-loaded operation conditions alternately, especially in semiconductor manufacturing process.

Abstract: According to the present invention, the most challenging issues in this work have been to find systematic ways of enabling maintenance engineers to decide an adequate time for the replacement of vacuum pumps on the basis of their current performance assessment result. Further, the comparison of the currently evaluated diagnostics analysis results and the initial (or reference) data set is shown to enable maintenance engineers to decide the replacement of the considered vacuum pump according to the evaluated pump performance indicators. This quantitative diagnostic analysis result is expected not only to enable maintenance engineers to decide an adequate time for the replacement of vacuum pumps on the basis of their current performance assessment results but also to improve the reliability and confidence of the predictive maintenance of low vacuum pumps.

Abstract: Provided is a dynamic balancing apparatus using a simple harmonic angular motion, including a rotational shaft on which a rotational body having an unbalanced mass is installed; a simple angular motion generator for periodically vibrating the rotational shaft; a support for supporting both sides of the rotational shaft; an angular vibration measuring sensor for measuring the simple harmonic angular motion of the rotational shaft; and force or vibration transducers for measuring applied force acting on or vibration transferred to the support by means of the simple harmonic motion of the unbalance mass.

Abstract: Provided is a dynamic balancing apparatus using a linear time-varying angular velocity model, which includes a rotational shaft on which a rotational body having a rotating unbalanced mass is installed; a linear time-varying angular velocity generator which allow the rotational shaft to be rotated at a linear time-varying angular velocity; a support for supporting both sides of the rotational shaft; and a transducer for measuring applied force or vibration transferred to the support by revolution of the rotational shaft having a linear time-varying angular velocity.

Abstract: According to the present invention, the most challenging issues in this work have been to find systematic ways of enabling maintenance engineers to decide an adequate time for the replacement of vacuum pumps on the basis of their current performance assessment result. Further, the comparison of the currently evaluated diagnostics analysis results and the initial (or reference) data set is shown to enable maintenance engineers to decide the replacement of the considered vacuum pump according to the evaluated pump performance indicators. This quantitative diagnostic analysis result is expected not only to enable maintenance engineers to decide an adequate time for the replacement of vacuum pumps on the basis of their current performance assessment results but also to improve the reliability and confidence of the predictive maintenance of low vacuum pumps.

Abstract: The present invention such as active diagnostic algorithms is developed not only to realize the early detection of degraded vacuum pumps for the protection of pump failure but also to provide their predictive maintenance. According to the present invention, it is possible to find simple and effective ways to deal with technical problems arising from the large variability of the pump-by-pump operation characteristics and the multiple process conditions where pumps run under the idle operation and gas-loaded operation conditions alternately, especially in semiconductor manufacturing process.