Patents by Inventor Wanyee Apple Chow

Wanyee Apple Chow has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for inspecting manufactured products for defects in response to in-situ monitoring
    Patent number: 5896294
    Abstract: An apparatus and method for selecting products to inspect for defects performs in-situ monitoring of a processing tool during a manufacturing processing step. The data from the in-situ monitoring for a test run of products is correlated by a neural network with data collected during inspection of the test products for defects. During a production run of products, the in-situ monitor data is provided to the neural network which, based on the input data and the correlation, predicts the values of the data that would be collected upon inspection of the products. Specific products from the production run are selected for inspection based upon the predicted values.
    Type: Grant
    Filed: March 11, 1997
    Date of Patent: April 20, 1999
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Wanyee Apple Chow, Ming C. Chen, Yung-Tao Lin, Ying Shiau